Identification and control of a 3DOF metrological AFM

R.J.E. Merry; M. Uyanik; K.R. Koops; M.J.G. Molengraft, van de; M.G.A. Veghel, van; M. Steinbuch

Identification and control of a 3DOF metrological AFM

R.J.E. Merry, M. Uyanik, K.R. Koops, M.J.G. Molengraft, van de, M.G.A. Veghel, van, M. Steinbuch

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Original language	English
Title of host publication	27th Benelux Meeting on Systems and Control, Heeze, The Netherlands, March 18-20, 2008. Book of abstracts
Place of Publication	Netherlands, Heeze
Pages	paper-199
Publication status	Published - 2008
Event	27th Benelux Meeting on Systems and Control, March 18-20, 2008, Heeze, The Netherlands - Heeze, Netherlands Duration: 18 Mar 2008 → 20 Mar 2008

Conference

Conference	27th Benelux Meeting on Systems and Control, March 18-20, 2008, Heeze, The Netherlands
Country/Territory	Netherlands
City	Heeze
Period	18/03/08 → 20/03/08

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Metis216990Final published version, 72.2 KB

Cite this

@inproceedings{6f4a42b13c464f6aa7a9e338b1747509,

title = "Identification and control of a 3DOF metrological AFM",

author = "R.J.E. Merry and M. Uyanik and K.R. Koops and \{Molengraft, van de\}, M.J.G. and \{Veghel, van\}, M.G.A. and M. Steinbuch",

year = "2008",

language = "English",

pages = "paper--199",

booktitle = "27th Benelux Meeting on Systems and Control, Heeze, The Netherlands, March 18-20, 2008. Book of abstracts",

note = "27th Benelux Meeting on Systems and Control, March 18-20, 2008, Heeze, The Netherlands ; Conference date: 18-03-2008 Through 20-03-2008",

}

Merry, RJE, Uyanik, M, Koops, KR, Molengraft, van de, MJG, Veghel, van, MGA & Steinbuch, M 2008, Identification and control of a 3DOF metrological AFM. in 27th Benelux Meeting on Systems and Control, Heeze, The Netherlands, March 18-20, 2008. Book of abstracts. Netherlands, Heeze, pp. paper-199, 27th Benelux Meeting on Systems and Control, March 18-20, 2008, Heeze, The Netherlands, Heeze, Netherlands, 18/03/08.

TY - GEN

T1 - Identification and control of a 3DOF metrological AFM

AU - Merry, R.J.E.

AU - Uyanik, M.

AU - Koops, K.R.

AU - Molengraft, van de, M.J.G.

AU - Veghel, van, M.G.A.

AU - Steinbuch, M.

PY - 2008

Y1 - 2008

M3 - Conference contribution

SP - paper-199

BT - 27th Benelux Meeting on Systems and Control, Heeze, The Netherlands, March 18-20, 2008. Book of abstracts

CY - Netherlands, Heeze

T2 - 27th Benelux Meeting on Systems and Control, March 18-20, 2008, Heeze, The Netherlands

Y2 - 18 March 2008 through 20 March 2008

ER -