ICP etching of InP and its applications in photonic circuits

Y.C. Zhu, F. Karouta, E.J. Geluk, T. Vries, de, J.J.G.M. Tol, van der, M.K. Smit

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	IEEE/LEOS Benelux Annual Symposium 2003, Enschede, 20-21 Nov. 2003
Place of Publication	Piscataway
Publisher	Institute of Electrical and Electronics Engineers
Pages	81-84
Publication status	Published - 2003

Cite this

@inproceedings{34a5fc3809e04fea8202ef29a89b36e8,

title = "ICP etching of InP and its applications in photonic circuits",

author = "Y.C. Zhu and F. Karouta and E.J. Geluk and {Vries, de}, T. and {Tol, van der}, J.J.G.M. and M.K. Smit",

year = "2003",

language = "English",

pages = "81--84",

booktitle = "IEEE/LEOS Benelux Annual Symposium 2003, Enschede, 20-21 Nov. 2003",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

}

TY - GEN

T1 - ICP etching of InP and its applications in photonic circuits

AU - Zhu, Y.C.

AU - Karouta, F.

AU - Geluk, E.J.

AU - Vries, de, T.

AU - Tol, van der, J.J.G.M.

AU - Smit, M.K.

PY - 2003

Y1 - 2003

M3 - Conference contribution

SP - 81

EP - 84

BT - IEEE/LEOS Benelux Annual Symposium 2003, Enschede, 20-21 Nov. 2003

PB - Institute of Electrical and Electronics Engineers

CY - Piscataway

ER -