ICP etching of InP and its applications in photonic circuits

Y.C. Zhu, F. Karouta, E.J. Geluk, T. Vries, de, J.J.G.M. Tol, van der, M.K. Smit

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationIEEE/LEOS Benelux Annual Symposium 2003, Enschede, 20-21 Nov. 2003
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Publication statusPublished - 2003

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