ICP etching of InP and its applications in photonic circuits

Y.C. Zhu, F. Karouta, E.J. Geluk, T. Vries, de, J.J.G.M. Tol, van der, M.K. Smit

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationIEEE/LEOS Benelux Annual Symposium 2003, Enschede, 20-21 Nov. 2003
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Pages81-84
Publication statusPublished - 2003

Cite this

Zhu, Y. C., Karouta, F., Geluk, E. J., Vries, de, T., Tol, van der, J. J. G. M., & Smit, M. K. (2003). ICP etching of InP and its applications in photonic circuits. In IEEE/LEOS Benelux Annual Symposium 2003, Enschede, 20-21 Nov. 2003 (pp. 81-84). Institute of Electrical and Electronics Engineers.