Hydroxide catalysis bonding of silicon carbide

A.A. Veggel, van, D.A. Ende, van den, J. Bogenstahl, S. Rowan, W. Cunningham, G.H.M. Gubbels, H. Nijmeijer

Research output: Contribution to journalArticleAcademicpeer-review

32 Citations (Scopus)

Abstract

For bonding silicon carbide optics, which require extreme stability, hydroxide catalysis bonding is considered [Rowan, S., Hough, J. and Elliffe, E., Silicon carbide bonding. UK Patent 040 7953.9, 2004. Please contact Mr. D. Whiteford for further information: ]. This technique is already used for bonding silicate-based materials, like fused silica and Zerodur. In application with silicon carbide, the technique is highly exptl. and the aim is to test the strength of the bond with silicon carbide. The silicon carbide is polished to l/10 PV flatness and then oxidized at 1100 DegC in a wet environment prior to bonding to form a necessary layer of SiO2 on the surface. The bonding is performed in clean room conditions. After bonding the pieces are sawed into bars to det. the strength in a four-point bending expt. The oxidization process shows many different color changes indicating thickness variations and contamination of the oxidization process. The bonding has been performed with success. However, these bonds are not resistant against aq. cooling fluids, which are used during sawing. Several bars have survived the sawing and a max. strength of 30 N mm-2 has been measured.
Original languageEnglish
Pages (from-to)303-310
JournalJournal of the European Ceramic Society
Volume28
Issue number1
DOIs
Publication statusPublished - 2008

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