Hydrogen poor cationic silicon clusters in an expanding argon-hydrogen-silane plasma

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@article{bbb6983b3a9f4b808a659db935dc9d6b,

title = "Hydrogen poor cationic silicon clusters in an expanding argon-hydrogen-silane plasma",

author = "W.M.M. Kessels and {Sanden, van de}, M.C.M. and D.C. Schram",

year = "1998",

doi = "10.1063/1.121367",

language = "English",

volume = "72",

pages = "2397--2399",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "19",

}