Hydrogen injection in ETP plasma jet for fast-deposition of high-quality a-Si:H

A.M.H.N. Petit, R.A.C.M.M. Swaaij, van, M.C.M. Sanden, van de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationAmorphous and Nanocrystalline Silicon Science and Technology
EditorsG. Ganguly
Pages359-364
Publication statusPublished - 2004
Event2004 Amorphous and Nanocrystalline Silicon-Based Films Symposium - San Francisco, United States
Duration: 13 Apr 200416 Apr 2004

Publication series

NameMaterials Research Society Symposium Proceedings
Volume808
ISSN (Print)0272-9172

Conference

Conference2004 Amorphous and Nanocrystalline Silicon-Based Films Symposium
Country/TerritoryUnited States
CitySan Francisco
Period13/04/0416/04/04

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