Hydrogen incorporation during fast deposition of amorphous hydrogenated silicon

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Original language	English
Title of host publication	AVS, American Vacuum Society : 44th national symposium, San Jose, October 20-24, 1997 : Abstracts
Pages	121
Publication status	Published - 1997

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@inproceedings{69f2e14517f04a73a5c3dcb547f5b72a,

title = "Hydrogen incorporation during fast deposition of amorphous hydrogenated silicon",

author = "R.J. Severens and \{van de Pas\}, F. and \{Sanden, van de\}, M.C.M. and W.M.M. Kessels and \{IJzendoorn, van\}, L.J. and D.C. Schram",

year = "1997",

language = "English",

pages = "121",

booktitle = "AVS, American Vacuum Society : 44th national symposium, San Jose, October 20-24, 1997 : Abstracts",

}

TY - GEN

T1 - Hydrogen incorporation during fast deposition of amorphous hydrogenated silicon

AU - Severens, R.J.

AU - van de Pas, F.

AU - Sanden, van de, M.C.M.

AU - Kessels, W.M.M.

AU - IJzendoorn, van, L.J.

AU - Schram, D.C.

PY - 1997

Y1 - 1997

M3 - Conference contribution

SP - 121

BT - AVS, American Vacuum Society : 44th national symposium, San Jose, October 20-24, 1997 : Abstracts

ER -