Hydrogen incorporation during fast deposition of amorphous hydrogenated silicon

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

62 Downloads (Pure)
Original languageEnglish
Title of host publicationAVS, American Vacuum Society : 44th national symposium, San Jose, October 20-24, 1997 : Abstracts
Pages121
Publication statusPublished - 1997

Cite this