Hydrogen in an a-Si:H deposited by an expanding thermal plasma : A temperature, growth rate and isotope study

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationAmorphous and microcrystalline silicon technology - 1998 : symposium held April 14 - 17, 1998, San Francisco, California, U.S.A.
EditorsR.E.I. Schropp
Place of PublicationWarrendale (PA)
PublisherMaterials Research Society
ISBN (Print)1-558-99413-0
Publication statusPublished - 1999
Event1998 MRS Spring Meeting & Exhibit - San Francisco, United States
Duration: 13 Apr 199817 Apr 1998

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172


Conference1998 MRS Spring Meeting & Exhibit
Country/TerritoryUnited States
CitySan Francisco
OtherSymposium held at the 1998 MRS Spring Meeting
Internet address

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