Hydrogen atom sources; hydrogen kinetics, anomalous recombination and possible relevance to deposition

M.J. Graaf, de; R.J. Severens; Z. Qing; R P Dahiya; D.K. Otorbaev; R.F.G. Meulenbroeks; M.C.M. Sanden, van de; D.C. Schram

Hydrogen atom sources; hydrogen kinetics, anomalous recombination and possible relevance to deposition

M.J. Graaf, de, R.J. Severens, Z. Qing, R P Dahiya, D.K. Otorbaev, R.F.G. Meulenbroeks, M.C.M. Sanden, van de, D.C. Schram

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

A method is proposed for prodn. of intense H atom beams (fluences of 4x1021 atoms/s) using subatmospheric cascaded arc plasma with plasma currents up to 100 A. [on SciFinder (R)]

Original language	English
Title of host publication	Industrial applications of plasma physics : proceedings of the course and workshop held at Villa Monastero - Varenna, Italy, 2-11 September 1992
Editors	G. Bonizzoni, W. Hooke, E. Sindoni
Place of Publication	Bologna
Publisher	Compositori
Pages	495-496
ISBN (Print)	8877940506
Publication status	Published - 1993

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Graaf, de, M. J., Severens, R. J., Qing, Z., Dahiya, R. P., Otorbaev, D. K., Meulenbroeks, R. F. G., Sanden, van de, M. C. M., & Schram, D. C. (1993). Hydrogen atom sources; hydrogen kinetics, anomalous recombination and possible relevance to deposition. In G. Bonizzoni, W. Hooke, & E. Sindoni (Eds.), Industrial applications of plasma physics : proceedings of the course and workshop held at Villa Monastero - Varenna, Italy, 2-11 September 1992 (pp. 495-496). Compositori.

Graaf, de, M.J. ; Severens, R.J. ; Qing, Z. et al. / Hydrogen atom sources; hydrogen kinetics, anomalous recombination and possible relevance to deposition. Industrial applications of plasma physics : proceedings of the course and workshop held at Villa Monastero - Varenna, Italy, 2-11 September 1992. editor / G. Bonizzoni ; W. Hooke ; E. Sindoni. Bologna : Compositori, 1993. pp. 495-496

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title = "Hydrogen atom sources; hydrogen kinetics, anomalous recombination and possible relevance to deposition",

abstract = "A method is proposed for prodn. of intense H atom beams (fluences of 4x1021 atoms/s) using subatmospheric cascaded arc plasma with plasma currents up to 100 A. [on SciFinder (R)]",

author = "{Graaf, de}, M.J. and R.J. Severens and Z. Qing and Dahiya, {R P} and D.K. Otorbaev and R.F.G. Meulenbroeks and {Sanden, van de}, M.C.M. and D.C. Schram",

year = "1993",

language = "English",

isbn = "8877940506",

pages = "495--496",

editor = "G. Bonizzoni and W. Hooke and E. Sindoni",

booktitle = "Industrial applications of plasma physics : proceedings of the course and workshop held at Villa Monastero - Varenna, Italy, 2-11 September 1992",

publisher = "Compositori",

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Graaf, de, MJ, Severens, RJ, Qing, Z, Dahiya, RP, Otorbaev, DK, Meulenbroeks, RFG, Sanden, van de, MCM & Schram, DC 1993, Hydrogen atom sources; hydrogen kinetics, anomalous recombination and possible relevance to deposition. in G Bonizzoni, W Hooke & E Sindoni (eds), Industrial applications of plasma physics : proceedings of the course and workshop held at Villa Monastero - Varenna, Italy, 2-11 September 1992. Compositori, Bologna, pp. 495-496.

Hydrogen atom sources; hydrogen kinetics, anomalous recombination and possible relevance to deposition. / Graaf, de, M.J.; Severens, R.J.; Qing, Z. et al.
Industrial applications of plasma physics : proceedings of the course and workshop held at Villa Monastero - Varenna, Italy, 2-11 September 1992. ed. / G. Bonizzoni; W. Hooke; E. Sindoni. Bologna: Compositori, 1993. p. 495-496.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Hydrogen atom sources; hydrogen kinetics, anomalous recombination and possible relevance to deposition

AU - Graaf, de, M.J.

AU - Severens, R.J.

AU - Qing, Z.

AU - Dahiya, R P

AU - Otorbaev, D.K.

AU - Meulenbroeks, R.F.G.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

PY - 1993

Y1 - 1993

N2 - A method is proposed for prodn. of intense H atom beams (fluences of 4x1021 atoms/s) using subatmospheric cascaded arc plasma with plasma currents up to 100 A. [on SciFinder (R)]

AB - A method is proposed for prodn. of intense H atom beams (fluences of 4x1021 atoms/s) using subatmospheric cascaded arc plasma with plasma currents up to 100 A. [on SciFinder (R)]

M3 - Conference contribution

SN - 8877940506

SP - 495

EP - 496

BT - Industrial applications of plasma physics : proceedings of the course and workshop held at Villa Monastero - Varenna, Italy, 2-11 September 1992

A2 - Bonizzoni, G.

A2 - Hooke, W.

A2 - Sindoni, E.

PB - Compositori

CY - Bologna

ER -

Graaf, de MJ, Severens RJ, Qing Z, Dahiya RP, Otorbaev DK, Meulenbroeks RFG et al. Hydrogen atom sources; hydrogen kinetics, anomalous recombination and possible relevance to deposition. In Bonizzoni G, Hooke W, Sindoni E, editors, Industrial applications of plasma physics : proceedings of the course and workshop held at Villa Monastero - Varenna, Italy, 2-11 September 1992. Bologna: Compositori. 1993. p. 495-496

Hydrogen atom sources; hydrogen kinetics, anomalous recombination and possible relevance to deposition

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