Hydrogen atom and ion source

R.J. Severens; M.J. de Graaf; Z. Qing; D.K. Otorbaev; R.P. Dahiya; J.C.A. Wevers; R.F.G. Meulenbroeks; M.C.M. van de Sanden; D.C. Schram

Hydrogen atom and ion source

R.J. Severens, M.J. de Graaf, Z. Qing, D.K. Otorbaev, R.P. Dahiya, J.C.A. Wevers, R.F.G. Meulenbroeks, M.C.M. van de Sanden, D.C. Schram

Research output: Contribution to conference › Abstract › Academic

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Original language	English
Number of pages	1
Publication status	Published - 1993
Event	46th Annual Gaseous Electronics Conference - Montreal, Canada Duration: 19 Oct 1993 → 22 Oct 1993

Conference

Conference	46th Annual Gaseous Electronics Conference
Country/Territory	Canada
City	Montreal
Period	19/10/93 → 22/10/93

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Cite this

@conference{0374d5abb3754960857dffa2e3b5be88,

title = "Hydrogen atom and ion source",

author = "R.J. Severens and {de Graaf}, M.J. and Z. Qing and D.K. Otorbaev and R.P. Dahiya and J.C.A. Wevers and R.F.G. Meulenbroeks and {van de Sanden}, M.C.M. and D.C. Schram",

year = "1993",

language = "English",

note = "46th Annual Gaseous Electronics Conference ; Conference date: 19-10-1993 Through 22-10-1993",

}