Hybrid sputtering-remote PECVD deposition of Au nanoparticles on SiO 2 layers for surface plasmon resonance-based colored coatings

Haue Takele Beyene, Frans D. Tichelaar, Paul Peeters, Ivan Kolev, Mauritius C.M. Van De Sanden, Mariadriana Creatore

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)


In this paper, a hybrid system consisting of metal nano-particles dispersed on the surface of a dielectric layer is presented: a remote Expanding Thermal Plasma CVD system is used for the deposition of the inorganic (i.e. SiO 2) layers from hexamethyldisiloxane/oxygen mixtures in combination with an rf magnetron sputtering tool for the deposition of metallic (i.e. gold) nanoparticles on top of the SiO2 layers. The optical properties of the Au/ SiO2 layers have been investigated by means of UVVIS-NIR variable angle spectroscopic ellipsometry. Rutherford backscattering and transmission electron microscopy were used to determine the film density, the nanoparticle size and its distribution, respectively. The uniform distribution of gold nanoparticles on the surface of the SiO2 layers allows obtaining redto blue- colored coatings as a consequence of the shift of the surface plasmon resonance band to higher wavelengths, caused by an increase in size of nanoparticles and metal surface coverage. (Figure Presented)

Original languageEnglish
Pages (from-to)657-664
Number of pages8
JournalPlasma Processes and Polymers
Issue number8
Publication statusPublished - 23 Aug 2010


  • Au nanoparticles
  • Composite layers
  • Magnetron sputtering
  • SiO


Dive into the research topics of 'Hybrid sputtering-remote PECVD deposition of Au nanoparticles on SiO <sub>2</sub> layers for surface plasmon resonance-based colored coatings'. Together they form a unique fingerprint.

Cite this