Abstract
This paper discusses a novel hybrid integrator design that (a) gives improved low-frequency disturbance rejection properties under double-integrator control, but (b) avoids the unwanted occurrence of overshoot and settling effects otherwise resulting from adding an extra linear integrator. The main principle behind this new design is that the resulting hybrid element generates a continuous control output signal based on integrator action when possible, while overall satisfying a sector condition that restricts the input-output behavior to a [0, kh]-sector, where kh is a positive gain derived from a closed-loop stability argument. In fact, closed-loop stability can be guaranteed on the basis of a circle-criterion-like argument and checked through (measured) frequency response data, thereby avoiding the need for parametric models. The strengths of this new hybrid integrator will be demonstrated experimentally on a wafer stage system of an industrial wafer scanner.
Original language | English |
---|---|
Title of host publication | 2017 American Control Conference (ACC), 24-26 May 2017, Seattle, Washington |
Place of Publication | Piscataway |
Publisher | Institute of Electrical and Electronics Engineers |
Pages | 2863-2868 |
Number of pages | 6 |
ISBN (Electronic) | 978-1-5090-5992-8 |
ISBN (Print) | 978-1-5090-4583-9 |
DOIs | |
Publication status | Published - 29 Jun 2017 |
Event | 2017 American Control Conference (ACC 2017) - Sheraton Seattle Hotel, Seattle, United States Duration: 24 May 2017 → 26 May 2017 http://acc2017.a2c2.org/ |
Conference
Conference | 2017 American Control Conference (ACC 2017) |
---|---|
Abbreviated title | ACC 2017 |
Country/Territory | United States |
City | Seattle |
Period | 24/05/17 → 26/05/17 |
Internet address |