Hybrid integrator design for enhanced tracking in motion control

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This paper discusses a novel hybrid integrator design that (a) gives improved low-frequency disturbance rejection properties under double-integrator control, but (b) avoids the unwanted occurrence of overshoot and settling effects otherwise resulting from adding an extra linear integrator. The main principle behind this new design is that the resulting hybrid element generates a continuous control output signal based on integrator action when possible, while overall satisfying a sector condition that restricts the input-output behavior to a [0, kh]-sector, where kh is a positive gain derived from a closed-loop stability argument. In fact, closed-loop stability can be guaranteed on the basis of a circle-criterion-like argument and checked through (measured) frequency response data, thereby avoiding the need for parametric models. The strengths of this new hybrid integrator will be demonstrated experimentally on a wafer stage system of an industrial wafer scanner.

Original languageEnglish
Title of host publication2017 American Control Conference (ACC), 24-26 May 2017, Seattle, Washington
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Number of pages6
ISBN (Electronic)978-1-5090-5992-8
ISBN (Print)978-1-5090-4583-9
Publication statusPublished - 29 Jun 2017
Event2017 American Control Conference (ACC 2017) - Sheraton Seattle Hotel, Seattle, United States
Duration: 24 May 201726 May 2017


Conference2017 American Control Conference (ACC 2017)
Abbreviated titleACC 2017
Country/TerritoryUnited States
Internet address


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