Hybrid integral reset control with application to a lens motion system

K.G.J. Gruntjens, Marcel F. Heertjes, S.J.L.M. van Loon, Nathan van de Wouw, W.P.M.H. Heemels

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Abstract

A hybrid integral controller with reset is proposed. This hybrid controller ensures improved low-frequency disturbance rejection properties under double integrator (PI2D) control without inducing the undesired increase of overshoot otherwise resulting from adding an extra linear integrator to a PID controller. The controller is applied to an optical lens motion system that requires PID control in one operating mode and PI2D control in the other, therewith motivating a hybrid integral control strategy. The reset element in the controller is included to improve transient performance. To guarantee closed-loop stability, a conditional (and partial) reset rule is introduced that restricts the input-output behavior of the dynamic reset element, i.e., the hybrid integrator with reset, to a bounded sector. As a result, stability can be guaranteed on the basis of a circle criterion-like argument and checked by (measured) frequency response data. Stability and performance of the hybrid integral control design with conditional (and partial) reset are investigated by application to a piezo-actuated lens system that is part of an industrial wafer scanner.

Original languageEnglish
Title of host publication2019 American Control Conference, ACC 2019
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Pages2408-2413
Number of pages6
ISBN (Electronic)978-1-5386-7926-5
DOIs
Publication statusPublished - 1 Jul 2019
Event2019 American Control Conference, ACC 2019 - Philadelphia, United States
Duration: 10 Jul 201912 Jul 2019
http://acc2019.a2c2.org

Conference

Conference2019 American Control Conference, ACC 2019
Abbreviated titleACC2019
CountryUnited States
CityPhiladelphia
Period10/07/1912/07/19
Internet address

Keywords

  • Circle criterion
  • Hybrid control
  • Lyapunov stability
  • Motion systems
  • Reset control
  • Wafer scanners

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