Abstract
A hybrid integral controller with reset is proposed. This hybrid controller ensures improved low-frequency disturbance rejection properties under double integrator (PI2D) control without inducing the undesired increase of overshoot otherwise resulting from adding an extra linear integrator to a PID controller. The controller is applied to an optical lens motion system that requires PID control in one operating mode and PI2D control in the other, therewith motivating a hybrid integral control strategy. The reset element in the controller is included to improve transient performance. To guarantee closed-loop stability, a conditional (and partial) reset rule is introduced that restricts the input-output behavior of the dynamic reset element, i.e., the hybrid integrator with reset, to a bounded sector. As a result, stability can be guaranteed on the basis of a circle criterion-like argument and checked by (measured) frequency response data. Stability and performance of the hybrid integral control design with conditional (and partial) reset are investigated by application to a piezo-actuated lens system that is part of an industrial wafer scanner.
Original language | English |
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Title of host publication | 2019 American Control Conference, ACC 2019 |
Place of Publication | Piscataway |
Publisher | Institute of Electrical and Electronics Engineers |
Pages | 2408-2413 |
Number of pages | 6 |
ISBN (Electronic) | 978-1-5386-7926-5 |
DOIs | |
Publication status | Published - 1 Jul 2019 |
Event | 2019 American Control Conference, ACC 2019 - Philadelphia, United States Duration: 10 Jul 2019 → 12 Jul 2019 http://acc2019.a2c2.org |
Conference
Conference | 2019 American Control Conference, ACC 2019 |
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Abbreviated title | ACC 2019 |
Country/Territory | United States |
City | Philadelphia |
Period | 10/07/19 → 12/07/19 |
Internet address |
Funding
This research is financially supported by the Dutch Science Foundation STW via the project ”Hyper Motion: Hybrid Control for Performance Improvement of Linear Motion Systems” (no. 10953).
Keywords
- Circle criterion
- Hybrid control
- Lyapunov stability
- Motion systems
- Reset control
- Wafer scanners