How to fabricate the world’s smallest polarization converter?

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Abstract

Recently, an ultra-short polarization converter in Indium phosphide membrane was proposed with excellent simulated performance. In this paper, we present experimental results showing that this device can be fabricated using high-resolution lithography and dry/wet-etch steps.
Original languageEnglish
Publication statusPublished - 2011
Event15th IEEE Photonics Society Benelux Annual Workshop - Mons, Belgium
Duration: 15 Jun 201115 Jun 2011

Workshop

Workshop15th IEEE Photonics Society Benelux Annual Workshop
CountryBelgium
CityMons
Period15/06/1115/06/11

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  • Cite this

    Pello, J., Tol, van der, J. J. G. M., Roelkens, G., Ambrosius, H. P. M. M., & Smit, M. K. (2011). How to fabricate the world’s smallest polarization converter?. 15th IEEE Photonics Society Benelux Annual Workshop, Mons, Belgium.