How Learning Control Supports Industry 4.0 in Semiconductor Manufacturing

Gijs van der Veen, Joep Stokkermans, Noud Mooren, Tom Oomen

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Original languageEnglish
Title of host publicationProceedings of the 2020 ASPE Spring Topical Meeting on Design and Control of Precision Mechatronic Systems
Place of PublicationCambridge, Massachusetts
PublisherAmerican Society of Precision Engineering (ASPE)
Pages1-5
ISBN (Print)978-1-887706-79-7
Publication statusPublished - 2020
EventASPE Spring Topical Meeting 2020: Design and Control of Precision Mechatronic Systems - Virtual Meeting -
Duration: 6 May 20208 May 2020
https://aspe.net/aspe-2020-spring-design-and-control-of-precision-mechatronic-systems/

Conference

ConferenceASPE Spring Topical Meeting 2020: Design and Control of Precision Mechatronic Systems - Virtual Meeting
Period6/05/208/05/20
Internet address

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