How Learning Control Supports Industry 4.0 in Semiconductor Manufacturing

Gijs van der Veen; Joep Stokkermans; Noud Mooren; Tom Oomen

How Learning Control Supports Industry 4.0 in Semiconductor Manufacturing

Gijs van der Veen, Joep Stokkermans, Noud Mooren, Tom Oomen

Control Systems Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Original language	English
Title of host publication	Proceedings of the 2020 ASPE Spring Topical Meeting on Design and Control of Precision Mechatronic Systems
Place of Publication	Cambridge, Massachusetts
Publisher	American Society of Precision Engineering (ASPE)
Pages	1-5
ISBN (Print)	978-1-887706-79-7
Publication status	Published - 2020
Event	ASPE Spring Topical Meeting 2020: Design and Control of Precision Mechatronic Systems - Virtual Meeting - Duration: 6 May 2020 → 8 May 2020 https://aspe.net/aspe-2020-spring-design-and-control-of-precision-mechatronic-systems/

Conference

Conference	ASPE Spring Topical Meeting 2020: Design and Control of Precision Mechatronic Systems - Virtual Meeting
Period	6/05/20 → 8/05/20
Internet address	https://aspe.net/aspe-2020-spring-design-and-control-of-precision-mechatronic-systems/

Access to Document

VeenStoMooOom2020Final author version , 2.71 MB

Cite this

@inproceedings{34756633a9e24146afad9b42cbe8a1f5,

title = "How Learning Control Supports Industry 4.0 in Semiconductor Manufacturing",

author = "{van der Veen}, Gijs and Joep Stokkermans and Noud Mooren and Tom Oomen",

year = "2020",

language = "English",

isbn = "978-1-887706-79-7",

pages = "1--5",

booktitle = "Proceedings of the 2020 ASPE Spring Topical Meeting on Design and Control of Precision Mechatronic Systems",

publisher = "American Society of Precision Engineering (ASPE)",

note = "ASPE Spring Topical Meeting 2020: Design and Control of Precision Mechatronic Systems - Virtual Meeting ; Conference date: 06-05-2020 Through 08-05-2020",

url = "https://aspe.net/aspe-2020-spring-design-and-control-of-precision-mechatronic-systems/",

}

van der Veen, G, Stokkermans, J, Mooren, N & Oomen, T 2020, How Learning Control Supports Industry 4.0 in Semiconductor Manufacturing. in Proceedings of the 2020 ASPE Spring Topical Meeting on Design and Control of Precision Mechatronic Systems. American Society of Precision Engineering (ASPE), Cambridge, Massachusetts, pp. 1-5, ASPE Spring Topical Meeting 2020: Design and Control of Precision Mechatronic Systems - Virtual Meeting, 6/05/20.

How Learning Control Supports Industry 4.0 in Semiconductor Manufacturing. / van der Veen, Gijs; Stokkermans, Joep; Mooren, Noud ; Oomen, Tom.

Proceedings of the 2020 ASPE Spring Topical Meeting on Design and Control of Precision Mechatronic Systems. Cambridge, Massachusetts : American Society of Precision Engineering (ASPE), 2020. p. 1-5.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - How Learning Control Supports Industry 4.0 in Semiconductor Manufacturing

AU - van der Veen, Gijs

AU - Stokkermans, Joep

AU - Mooren, Noud

AU - Oomen, Tom

PY - 2020

Y1 - 2020

M3 - Conference contribution

SN - 978-1-887706-79-7

SP - 1

EP - 5

BT - Proceedings of the 2020 ASPE Spring Topical Meeting on Design and Control of Precision Mechatronic Systems

PB - American Society of Precision Engineering (ASPE)

CY - Cambridge, Massachusetts

T2 - ASPE Spring Topical Meeting 2020: Design and Control of Precision Mechatronic Systems - Virtual Meeting

Y2 - 6 May 2020 through 8 May 2020

ER -