Hot-wire deposition of a-Si:H thin films on wafer substrates studied by real-time spectroscopic ellipsometry and infrared spectroscopy

P.J. Oever, van den, J.J.H. Gielis, M.C.M. Sanden, van de, W.M.M. Kessels

Research output: Contribution to journal › Article › Academic › peer-review

7 Citations (Scopus)

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