Hot electrons in an expanding magnetized hydrogen plasma

D.K. Otorbaev, Z. Qing, G.J.H. Brussaard, M.C.M. Sanden, van de, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingChapterAcademic

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Abstract

Magnetized expanding was studied of H plasmas at low pressures. Applications of this process in microelectronics is discussed.
Original languageEnglish
Title of host publicationElectron Kinetics and Applications of Glow Discharges
EditorsU. Kortshagen, L.D. Tsendin
Place of PublicationNew York
PublisherPlenum Press
Pages459-469
Number of pages557
ISBN (Print)0-306-45822-5
Publication statusPublished - 1998
Eventconference; NATO Advanced Research Workshop on Electron Kinetics and Applications of Glow Discharges (May 1997 ; St. Petersburg) -
Duration: 1 Jan 1998 → …

Publication series

NameNATO ASI series. Series B. Physics
Volume367
ISSN (Print)0258-1221

Conference

Conferenceconference; NATO Advanced Research Workshop on Electron Kinetics and Applications of Glow Discharges (May 1997 ; St. Petersburg)
Period1/01/98 → …
OtherNATO Advanced Research Workshop on Electron Kinetics and Applications of Glow Discharges (May 1997 ; St. Petersburg)

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