Hot electrons in an expanding magnetized hydrogen plasma

D.K. Otorbaev; Z. Qing; G.J.H. Brussaard; M.C.M. Sanden, van de; D.C. Schram

Hot electrons in an expanding magnetized hydrogen plasma

D.K. Otorbaev, Z. Qing, G.J.H. Brussaard, M.C.M. Sanden, van de, D.C. Schram

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic

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Abstract

Magnetized expanding was studied of H plasmas at low pressures. Applications of this process in microelectronics is discussed.

Original language	English
Title of host publication	Electron Kinetics and Applications of Glow Discharges
Editors	U. Kortshagen, L.D. Tsendin
Place of Publication	New York
Publisher	Plenum Press
Pages	459-469
Number of pages	557
ISBN (Print)	0-306-45822-5
Publication status	Published - 1998
Event	conference; NATO Advanced Research Workshop on Electron Kinetics and Applications of Glow Discharges (May 1997 ; St. Petersburg) - Duration: 1 Jan 1998 → …

Publication series

Name	NATO ASI series. Series B. Physics
Volume	367
ISSN (Print)	0258-1221

Conference

Conference	conference; NATO Advanced Research Workshop on Electron Kinetics and Applications of Glow Discharges (May 1997 ; St. Petersburg)
Period	1/01/98 → …
Other	NATO Advanced Research Workshop on Electron Kinetics and Applications of Glow Discharges (May 1997 ; St. Petersburg)

Cite this

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title = "Hot electrons in an expanding magnetized hydrogen plasma",

abstract = "Magnetized expanding was studied of H plasmas at low pressures. Applications of this process in microelectronics is discussed.",

author = "D.K. Otorbaev and Z. Qing and G.J.H. Brussaard and {Sanden, van de}, M.C.M. and D.C. Schram",

year = "1998",

language = "English",

isbn = "0-306-45822-5",

series = "NATO ASI series. Series B. Physics",

publisher = "Plenum Press",

pages = "459--469",

editor = "U. Kortshagen and L.D. Tsendin",

booktitle = "Electron Kinetics and Applications of Glow Discharges",

address = "United States",

note = "conference; NATO Advanced Research Workshop on Electron Kinetics and Applications of Glow Discharges (May 1997 ; St. Petersburg) ; Conference date: 01-01-1998",

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Otorbaev, DK, Qing, Z, Brussaard, GJH, Sanden, van de, MCM & Schram, DC 1998, Hot electrons in an expanding magnetized hydrogen plasma. in U Kortshagen & LD Tsendin (eds), Electron Kinetics and Applications of Glow Discharges. NATO ASI series. Series B. Physics, vol. 367, Plenum Press, New York, pp. 459-469, conference; NATO Advanced Research Workshop on Electron Kinetics and Applications of Glow Discharges (May 1997 ; St. Petersburg), 1/01/98.

Hot electrons in an expanding magnetized hydrogen plasma. / Otorbaev, D.K.; Qing, Z.; Brussaard, G.J.H.; Sanden, van de, M.C.M.; Schram, D.C.

Electron Kinetics and Applications of Glow Discharges. ed. / U. Kortshagen; L.D. Tsendin. New York : Plenum Press, 1998. p. 459-469 (NATO ASI series. Series B. Physics; Vol. 367).

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic

TY - CHAP

T1 - Hot electrons in an expanding magnetized hydrogen plasma

AU - Otorbaev, D.K.

AU - Qing, Z.

AU - Brussaard, G.J.H.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

PY - 1998

Y1 - 1998

N2 - Magnetized expanding was studied of H plasmas at low pressures. Applications of this process in microelectronics is discussed.

AB - Magnetized expanding was studied of H plasmas at low pressures. Applications of this process in microelectronics is discussed.

M3 - Chapter

SN - 0-306-45822-5

T3 - NATO ASI series. Series B. Physics

SP - 459

EP - 469

BT - Electron Kinetics and Applications of Glow Discharges

A2 - Kortshagen, U.

A2 - Tsendin, L.D.

PB - Plenum Press

CY - New York

T2 - conference; NATO Advanced Research Workshop on Electron Kinetics and Applications of Glow Discharges (May 1997 ; St. Petersburg)

Y2 - 1 January 1998

ER -

Hot electrons in an expanding magnetized hydrogen plasma

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