Highly regular self-organization of step bunches during growth of SiGe on Si(113)

A.A. Darhuber; J. Zhu; V. Holy; J. Stangl; P. Mikulik; K. Brunner; G. Abstreiter; G. Bauer

doi:10.1063/1.122197

Highly regular self-organization of step bunches during growth of SiGe on Si(113)

A.A. Darhuber, J. Zhu, V. Holy, J. Stangl, P. Mikulik, K. Brunner, G. Abstreiter, G. Bauer

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Abstract

We have studied the structural properties of highly periodic arrays of terrace steps in a Si/SiGe multilayer grown on a miscut Si(113) substrate by atomic force microscopy, x-ray reflection and high resolution x-ray diffraction. The data reveal a regular array of step bunches with vertical correlation within the multilayer and periodic surface steps extending over lengths of several tens of microns. The (113)-faceted terraces have a lateral period of about 360 nm which is locally modulated due to a long-range waviness of the surface.

Original language	English
Pages (from-to)	1535-1537
Number of pages	3
Journal	Applied Physics Letters
Volume	73
Issue number	11
DOIs	https://doi.org/10.1063/1.122197
Publication status	Published - 1998

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abstract = "We have studied the structural properties of highly periodic arrays of terrace steps in a Si/SiGe multilayer grown on a miscut Si(113) substrate by atomic force microscopy, x-ray reflection and high resolution x-ray diffraction. The data reveal a regular array of step bunches with vertical correlation within the multilayer and periodic surface steps extending over lengths of several tens of microns. The (113)-faceted terraces have a lateral period of about 360 nm which is locally modulated due to a long-range waviness of the surface.",

author = "A.A. Darhuber and J. Zhu and V. Holy and J. Stangl and P. Mikulik and K. Brunner and G. Abstreiter and G. Bauer",

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T1 - Highly regular self-organization of step bunches during growth of SiGe on Si(113)

AU - Darhuber, A.A.

AU - Zhu, J.

AU - Holy, V.

AU - Stangl, J.

AU - Mikulik, P.

AU - Brunner, K.

AU - Abstreiter, G.

AU - Bauer, G.

PY - 1998

Y1 - 1998

N2 - We have studied the structural properties of highly periodic arrays of terrace steps in a Si/SiGe multilayer grown on a miscut Si(113) substrate by atomic force microscopy, x-ray reflection and high resolution x-ray diffraction. The data reveal a regular array of step bunches with vertical correlation within the multilayer and periodic surface steps extending over lengths of several tens of microns. The (113)-faceted terraces have a lateral period of about 360 nm which is locally modulated due to a long-range waviness of the surface.

AB - We have studied the structural properties of highly periodic arrays of terrace steps in a Si/SiGe multilayer grown on a miscut Si(113) substrate by atomic force microscopy, x-ray reflection and high resolution x-ray diffraction. The data reveal a regular array of step bunches with vertical correlation within the multilayer and periodic surface steps extending over lengths of several tens of microns. The (113)-faceted terraces have a lateral period of about 360 nm which is locally modulated due to a long-range waviness of the surface.

U2 - 10.1063/1.122197

DO - 10.1063/1.122197

M3 - Article

VL - 73

SP - 1535

EP - 1537

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 11

ER -

Highly regular self-organization of step bunches during growth of SiGe on Si(113)

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