Highly efficient microcrystalline silicon solar cells deposited from a pure SiH4 flow

M. N. van den Donker; B. Rech; R. Schmitz; J. Klomfass; G. Dingemans; F. Finger; L. Houben; W.M.M. Kessels; M.C.M. van de Sanden

Highly efficient microcrystalline silicon solar cells deposited from a pure SiH4 flow

M. N. van den Donker
, B. Rech
, R. Schmitz
, J. Klomfass
, G. Dingemans
, F. Finger
, L. Houben
, W.M.M. Kessels
, M.C.M. van de Sanden

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

The effect of process parameters on the deposition of μc-Si:H solar cells is reviewed. Then, our approach to solar cell optimization is presented, in which in situ diagnostics are used to study the process stability. We compared a highly H₂-diluted condition with a pure SiH₄ flow condition, using optical emission spectroscopy (OES) to characterize the plasma and Raman spectroscopy to characterize the film. In low dilution conditions we measured a sharp drop of SiH emission in the first 90 s after plasma ignition, indicating uncontrolled deposition for the first ∼50 nm of film. This instability could be prevented by filling the chamber with pure H₂ and switching on the SiH₄ flow only shortly before plasma ignition. In the steady-state deposition phase following the transient depletion phase the H₂ flow hardly effected plasma emission and deposited film crystallinity. This is explained by a depletion of the SiH ₄. The pure SiH₄ flow deposition was applied into a μc-Si:H solar cell and yielded a solar energy conversion efficiency of 9.5%. In the discussion an updated view on the role of the process parameters total flow and dilution ratio is presented.

Original language	English
Title of host publication	Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2006
Editors	S. Wagner, V. Chu, H.A. Atwater, K. Yamamoto, H.W. Zan
Place of Publication	Warrendale, PA, USA
Publisher	Materials Research Society
Pages	701-711
Number of pages	11
ISBN (Print)	1558998667, 9781558998667
Publication status	Published - 2006
Event	2006 MRS Spring Meeting & Exhibit - San Francisco, United States Duration: 17 Apr 2006 → 21 Apr 2006 https://www.mrs.org/spring2006 http://www.mrs.org/s06-program-a/ http://www.mrs.org/s06-program-q/

Publication series

Name	Materials Research Society Symposium Proceedings
Volume	910
ISSN (Print)	0272-9172

Conference

Conference	2006 MRS Spring Meeting & Exhibit
Country/Territory	United States
City	San Francisco
Period	17/04/06 → 21/04/06
Other	Symposium held at the 2006 MRS Spring Meeting
Internet address	https://www.mrs.org/spring2006 http://www.mrs.org/s06-program-a/ http://www.mrs.org/s06-program-q/

Cite this

van den Donker, M. N., Rech, B., Schmitz, R., Klomfass, J., Dingemans, G., Finger, F., Houben, L., Kessels, W. M. M., & van de Sanden, M. C. M. (2006). Highly efficient microcrystalline silicon solar cells deposited from a pure SiH4 flow. In S. Wagner, V. Chu, H. A. Atwater, K. Yamamoto, & H. W. Zan (Eds.), Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2006 (pp. 701-711). (Materials Research Society Symposium Proceedings; Vol. 910). Materials Research Society.

van den Donker, M. N. ; Rech, B. ; Schmitz, R. et al. / Highly efficient microcrystalline silicon solar cells deposited from a pure SiH4 flow. Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2006. editor / S. Wagner ; V. Chu ; H.A. Atwater ; K. Yamamoto ; H.W. Zan. Warrendale, PA, USA : Materials Research Society, 2006. pp. 701-711 (Materials Research Society Symposium Proceedings).

@inproceedings{21ded4eab1c040ff93f92f84a627412e,

title = "Highly efficient microcrystalline silicon solar cells deposited from a pure SiH4 flow",

abstract = "The effect of process parameters on the deposition of μc-Si:H solar cells is reviewed. Then, our approach to solar cell optimization is presented, in which in situ diagnostics are used to study the process stability. We compared a highly H2-diluted condition with a pure SiH4 flow condition, using optical emission spectroscopy (OES) to characterize the plasma and Raman spectroscopy to characterize the film. In low dilution conditions we measured a sharp drop of SiH emission in the first 90 s after plasma ignition, indicating uncontrolled deposition for the first ∼50 nm of film. This instability could be prevented by filling the chamber with pure H2 and switching on the SiH4 flow only shortly before plasma ignition. In the steady-state deposition phase following the transient depletion phase the H2 flow hardly effected plasma emission and deposited film crystallinity. This is explained by a depletion of the SiH 4. The pure SiH4 flow deposition was applied into a μc-Si:H solar cell and yielded a solar energy conversion efficiency of 9.5\%. In the discussion an updated view on the role of the process parameters total flow and dilution ratio is presented.",

author = "\{van den Donker\}, \{M. N.\} and B. Rech and R. Schmitz and J. Klomfass and G. Dingemans and F. Finger and L. Houben and W.M.M. Kessels and \{van de Sanden\}, M.C.M.",

year = "2006",

language = "English",

isbn = "1558998667",

series = "Materials Research Society Symposium Proceedings",

publisher = "Materials Research Society",

pages = "701--711",

editor = "S. Wagner and V. Chu and H.A. Atwater and K. Yamamoto and H.W. Zan",

booktitle = "Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2006",

address = "United States",

note = "2006 MRS Spring Meeting \& Exhibit ; Conference date: 17-04-2006 Through 21-04-2006",

url = "https://www.mrs.org/spring2006, http://www.mrs.org/s06-program-a/, http://www.mrs.org/s06-program-q/",

}

van den Donker, MN, Rech, B, Schmitz, R, Klomfass, J, Dingemans, G, Finger, F, Houben, L, Kessels, WMM & van de Sanden, MCM 2006, Highly efficient microcrystalline silicon solar cells deposited from a pure SiH4 flow. in S Wagner, V Chu, HA Atwater, K Yamamoto & HW Zan (eds), Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2006. Materials Research Society Symposium Proceedings, vol. 910, Materials Research Society, Warrendale, PA, USA, pp. 701-711, 2006 MRS Spring Meeting & Exhibit, San Francisco, California, United States, 17/04/06.

Highly efficient microcrystalline silicon solar cells deposited from a pure SiH4 flow. / van den Donker, M. N.; Rech, B.; Schmitz, R. et al.
Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2006. ed. / S. Wagner; V. Chu; H.A. Atwater; K. Yamamoto; H.W. Zan. Warrendale, PA, USA: Materials Research Society, 2006. p. 701-711 (Materials Research Society Symposium Proceedings; Vol. 910).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Highly efficient microcrystalline silicon solar cells deposited from a pure SiH4 flow

AU - van den Donker, M. N.

AU - Rech, B.

AU - Schmitz, R.

AU - Klomfass, J.

AU - Dingemans, G.

AU - Finger, F.

AU - Houben, L.

AU - Kessels, W.M.M.

AU - van de Sanden, M.C.M.

PY - 2006

Y1 - 2006

N2 - The effect of process parameters on the deposition of μc-Si:H solar cells is reviewed. Then, our approach to solar cell optimization is presented, in which in situ diagnostics are used to study the process stability. We compared a highly H2-diluted condition with a pure SiH4 flow condition, using optical emission spectroscopy (OES) to characterize the plasma and Raman spectroscopy to characterize the film. In low dilution conditions we measured a sharp drop of SiH emission in the first 90 s after plasma ignition, indicating uncontrolled deposition for the first ∼50 nm of film. This instability could be prevented by filling the chamber with pure H2 and switching on the SiH4 flow only shortly before plasma ignition. In the steady-state deposition phase following the transient depletion phase the H2 flow hardly effected plasma emission and deposited film crystallinity. This is explained by a depletion of the SiH 4. The pure SiH4 flow deposition was applied into a μc-Si:H solar cell and yielded a solar energy conversion efficiency of 9.5%. In the discussion an updated view on the role of the process parameters total flow and dilution ratio is presented.

AB - The effect of process parameters on the deposition of μc-Si:H solar cells is reviewed. Then, our approach to solar cell optimization is presented, in which in situ diagnostics are used to study the process stability. We compared a highly H2-diluted condition with a pure SiH4 flow condition, using optical emission spectroscopy (OES) to characterize the plasma and Raman spectroscopy to characterize the film. In low dilution conditions we measured a sharp drop of SiH emission in the first 90 s after plasma ignition, indicating uncontrolled deposition for the first ∼50 nm of film. This instability could be prevented by filling the chamber with pure H2 and switching on the SiH4 flow only shortly before plasma ignition. In the steady-state deposition phase following the transient depletion phase the H2 flow hardly effected plasma emission and deposited film crystallinity. This is explained by a depletion of the SiH 4. The pure SiH4 flow deposition was applied into a μc-Si:H solar cell and yielded a solar energy conversion efficiency of 9.5%. In the discussion an updated view on the role of the process parameters total flow and dilution ratio is presented.

UR - https://www.scopus.com/pages/publications/34249939166

M3 - Conference contribution

SN - 1558998667

SN - 9781558998667

T3 - Materials Research Society Symposium Proceedings

SP - 701

EP - 711

BT - Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2006

A2 - Wagner, S.

A2 - Chu, V.

A2 - Atwater, H.A.

A2 - Yamamoto, K.

A2 - Zan, H.W.

PB - Materials Research Society

CY - Warrendale, PA, USA

T2 - 2006 MRS Spring Meeting & Exhibit

Y2 - 17 April 2006 through 21 April 2006

ER -

van den Donker MN, Rech B, Schmitz R, Klomfass J, Dingemans G, Finger F et al. Highly efficient microcrystalline silicon solar cells deposited from a pure SiH4 flow. In Wagner S, Chu V, Atwater HA, Yamamoto K, Zan HW, editors, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2006. Warrendale, PA, USA: Materials Research Society. 2006. p. 701-711. (Materials Research Society Symposium Proceedings).

Highly efficient microcrystalline silicon solar cells deposited from a pure SiH4 flow

Abstract

Publication series

Conference

Other files and links

Fingerprint

Cite this