Abstract
The effect of process parameters on the deposition of μc-Si:H solar cells is reviewed. Then, our approach to solar cell optimization is presented, in which in situ diagnostics are used to study the process stability. We compared a highly H2-diluted condition with a pure SiH4 flow condition, using optical emission spectroscopy (OES) to characterize the plasma and Raman spectroscopy to characterize the film. In low dilution conditions we measured a sharp drop of SiH emission in the first 90 s after plasma ignition, indicating uncontrolled deposition for the first ∼50 nm of film. This instability could be prevented by filling the chamber with pure H2 and switching on the SiH4 flow only shortly before plasma ignition. In the steady-state deposition phase following the transient depletion phase the H2 flow hardly effected plasma emission and deposited film crystallinity. This is explained by a depletion of the SiH 4. The pure SiH4 flow deposition was applied into a μc-Si:H solar cell and yielded a solar energy conversion efficiency of 9.5%. In the discussion an updated view on the role of the process parameters total flow and dilution ratio is presented.
Original language | English |
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Title of host publication | Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2006 |
Editors | S. Wagner, V. Chu, H.A. Atwater, K. Yamamoto, H.W. Zan |
Place of Publication | Warrendale, PA, USA |
Publisher | Materials Research Society |
Pages | 701-711 |
Number of pages | 11 |
ISBN (Print) | 1558998667, 9781558998667 |
Publication status | Published - 2006 |
Event | 2006 MRS Spring Meeting & Exhibit - San Francisco, United States Duration: 17 Apr 2006 → 21 Apr 2006 https://www.mrs.org/spring2006 http://www.mrs.org/s06-program-a/ http://www.mrs.org/s06-program-q/ |
Publication series
Name | Materials Research Society Symposium Proceedings |
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Volume | 910 |
ISSN (Print) | 0272-9172 |
Conference
Conference | 2006 MRS Spring Meeting & Exhibit |
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Country/Territory | United States |
City | San Francisco |
Period | 17/04/06 → 21/04/06 |
Other | Symposium held at the 2006 MRS Spring Meeting |
Internet address |