Highly efficient microcrystalline silicon solar cells deposited from a pure SiH4 flow

M. N. van den Donker, B. Rech, R. Schmitz, J. Klomfass, G. Dingemans, F. Finger, L. Houben, W.M.M. Kessels, M.C.M. van de Sanden

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

The effect of process parameters on the deposition of μc-Si:H solar cells is reviewed. Then, our approach to solar cell optimization is presented, in which in situ diagnostics are used to study the process stability. We compared a highly H2-diluted condition with a pure SiH4 flow condition, using optical emission spectroscopy (OES) to characterize the plasma and Raman spectroscopy to characterize the film. In low dilution conditions we measured a sharp drop of SiH emission in the first 90 s after plasma ignition, indicating uncontrolled deposition for the first ∼50 nm of film. This instability could be prevented by filling the chamber with pure H2 and switching on the SiH4 flow only shortly before plasma ignition. In the steady-state deposition phase following the transient depletion phase the H2 flow hardly effected plasma emission and deposited film crystallinity. This is explained by a depletion of the SiH 4. The pure SiH4 flow deposition was applied into a μc-Si:H solar cell and yielded a solar energy conversion efficiency of 9.5%. In the discussion an updated view on the role of the process parameters total flow and dilution ratio is presented.

Original languageEnglish
Title of host publicationAmorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2006
EditorsS. Wagner, V. Chu, H.A. Atwater, K. Yamamoto, H.W. Zan
Place of PublicationWarrendale, PA, USA
PublisherMaterials Research Society
Pages701-711
Number of pages11
ISBN (Print)1558998667, 9781558998667
Publication statusPublished - 2006
Event2006 MRS Spring Meeting & Exhibit - San Francisco, United States
Duration: 17 Apr 200621 Apr 2006
https://www.mrs.org/spring2006
http://www.mrs.org/s06-program-a/
http://www.mrs.org/s06-program-q/

Publication series

NameMaterials Research Society Symposium Proceedings
Volume910
ISSN (Print)0272-9172

Conference

Conference2006 MRS Spring Meeting & Exhibit
Country/TerritoryUnited States
CitySan Francisco
Period17/04/0621/04/06
OtherSymposium held at the 2006 MRS Spring Meeting
Internet address

Fingerprint

Dive into the research topics of 'Highly efficient microcrystalline silicon solar cells deposited from a pure SiH4 flow'. Together they form a unique fingerprint.

Cite this