High voltage power amplifier for high precision mechatronic systems

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Abstract

Mechatronic systems within industrial applications, e.g. semiconductor manufacturing equipment, require power amplifiers providing high power with high precision. Increasing voltage is favourable compared to increasing current to generate more output power due to limitations in system infrastructure. For this purpose, this research proposes a High Voltage power amplifier by applying a 5-level Flying Capacitor Resonant Pole Inverter (FC RPI). Moreover, trapezoidal filter inductor current, charge-based zero-voltage switching, and an elaborate output and filter current control scheme are added to the amplifier configuration. A model of a mechatronic system is used to generate a current setpoint waveform representing the load current for a single phase of a planar actuator generating forces in two directions. Time domain and spectral domain analysis are presented of the results obtained from the simulation platform constructed of the mechatronic, control and electrical systems. The obtained simulation results indicate proper functioning of the converter configuration, paving the way for future hardware implementation.

Original languageEnglish
Title of host publication2018 20th European Conference on Power Electronics and Applications (EPE'18 ECCE Europe)
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Number of pages10
ISBN (Electronic)978-9-0758-1528-3
Publication statusPublished - 30 Oct 2018
Event20th European Conference on Power Electronics and Applications, EPE 2018 ECCE Europe - Riga, Latvia
Duration: 17 Sep 201821 Sep 2018
Conference number: 20
http://www.epe2018.com/

Conference

Conference20th European Conference on Power Electronics and Applications, EPE 2018 ECCE Europe
Abbreviated titleEPE 2018 ECCE Europe
CountryLatvia
CityRiga
Period17/09/1821/09/18
Internet address

Keywords

  • «Amplifiers»
  • «High voltage power converters»
  • «Mechatronics»
  • «Multilevel converters»
  • «ZVS converters»

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