High-voltage actuation system for future generation lithography systems: power amplifier

S.J. Settels, J. Everts, J. van Duivenbode, E. Lomonova

Research output: Contribution to conferencePosterAcademic

5 Downloads (Pure)

Abstract

Current motion systems in lithography machines operate at a bus voltage of 600 V after a steady increase in the past decades. Increasing the voltage has the advantage of delivering more power without the cost of an increase in mass and volume of power cables. However, this requires a significant breakthrough in power amplifier technology since fast switching MOSFETs can only be used reliably up to 600 V and for higher voltages only slower switching devices are available. Fast switching SiC MOSFETs with higher forward voltages are available but are not sufficient for the required voltage increase.
Original languageEnglish
Publication statusPublished - 26 May 2016
EventGala Dinner Martin van den Brink Award, May 26, 2016, Eindhoven, The Netherlands - Evoluon, Eindhoven, Netherlands
Duration: 26 May 201626 May 2016
http://www.dspe.nl/centraal/events/gala-dinner-martin-van-den-brink-award/

Other

OtherGala Dinner Martin van den Brink Award, May 26, 2016, Eindhoven, The Netherlands
CountryNetherlands
CityEindhoven
Period26/05/1626/05/16
Internet address

Keywords

  • High Voltage
  • Power electronics
  • Motion control

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  • Activities

    • 1 Poster presentation

    High-Voltage Actuation System for Future Generation Lithography Systems: Power Amplifier

    Sjef Settels (Speaker)

    26 May 2016

    Activity: Talk or presentation typesPoster presentationScientific

    Cite this

    Settels, S. J., Everts, J., van Duivenbode, J., & Lomonova, E. (2016). High-voltage actuation system for future generation lithography systems: power amplifier. Poster session presented at Gala Dinner Martin van den Brink Award, May 26, 2016, Eindhoven, The Netherlands, Eindhoven, Netherlands.