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Current motion systems in lithography machines operate at a bus voltage of 600 V after a steady increase in the past decades. Increasing the voltage has the advantage of delivering more power without the cost of an increase in mass and volume of power cables. However, this requires a significant breakthrough in power amplifier technology since fast switching MOSFETs can only be used reliably up to 600 V and for higher voltages only slower switching devices are available. Fast switching SiC MOSFETs with higher forward voltages are available but are not sufficient for the required voltage increase.
|Publication status||Published - 26 May 2016|
|Event||Gala Dinner Martin van den Brink Award, May 26, 2016, Eindhoven, The Netherlands - Evoluon, Eindhoven, Netherlands|
Duration: 26 May 2016 → 26 May 2016
|Other||Gala Dinner Martin van den Brink Award, May 26, 2016, Eindhoven, The Netherlands|
|Period||26/05/16 → 26/05/16|
- High Voltage
- Power electronics
- Motion control
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- 1 Poster presentation
High-Voltage Actuation System for Future Generation Lithography Systems: Power Amplifier
Sjef Settels (Speaker)26 May 2016
Activity: Talk or presentation types › Poster presentation › Scientific