High-Voltage Actuation System for Future Generation Lithography systems - Power Amplifier

S.J. Settels; J. Everts; J. van Duivenbode; E. Lomonova

High-Voltage Actuation System for Future Generation Lithography systems - Power Amplifier

S.J. Settels, J. Everts, J. van Duivenbode, E. Lomonova

Research output: Contribution to conference › Poster

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Abstract

Current motion systems in lithography machines operate at a bus voltage of 600V after a steady increase in the past decades. Increasing the voltage has the advantage of delivering more power without the cost of an increase in mass and volume of power cables.
However, this requires a significant breakthrough in power amplifier technology since fast switching MOSFETs can only be used reliably up to 600 V and for higher voltages only slower switching devices are available.

Original language	English
Publication status	Published - 21 May 2015
Event	IEEE Western European Student and Young Professional congress (WESYP), May 20-24, 2015, Eindhoven, The Netherlands. - Eindhoven, Netherlands Duration: 20 May 2015 → 24 May 2015

Conference

Conference	IEEE Western European Student and Young Professional congress (WESYP), May 20-24, 2015, Eindhoven, The Netherlands.
Abbreviated title	WESYP
Country/Territory	Netherlands
City	Eindhoven
Period	20/05/15 → 24/05/15

Keywords

High Voltage
Power electronics

Cite this

@conference{772f8c33a04d4ce6a3b55355613ebd65,

title = "High-Voltage Actuation System for Future Generation Lithography systems - Power Amplifier",

abstract = "Current motion systems in lithography machines operate at a bus voltage of 600V after a steady increase in the past decades. Increasing the voltage has the advantage of delivering more power without the cost of an increase in mass and volume of power cables.However, this requires a significant breakthrough in power amplifier technology since fast switching MOSFETs can only be used reliably up to 600 V and for higher voltages only slower switching devices are available.",

keywords = "High Voltage, Power electronics",

author = "S.J. Settels and J. Everts and {van Duivenbode}, J. and E. Lomonova",

year = "2015",

month = may,

day = "21",

language = "English",

note = "IEEE Western European Student and Young Professional congress (WESYP), May 20-24, 2015, Eindhoven, The Netherlands., WESYP ; Conference date: 20-05-2015 Through 24-05-2015",

}

High-Voltage Actuation System for Future Generation Lithography systems - Power Amplifier. / Settels, S.J.; Everts, J.; van Duivenbode, J. et al.

2015. Poster session presented at IEEE Western European Student and Young Professional congress (WESYP), May 20-24, 2015, Eindhoven, The Netherlands., Eindhoven, Netherlands.

Research output: Contribution to conference › Poster

TY - CONF

T1 - High-Voltage Actuation System for Future Generation Lithography systems - Power Amplifier

AU - Settels, S.J.

AU - Everts, J.

AU - van Duivenbode, J.

AU - Lomonova, E.

PY - 2015/5/21

Y1 - 2015/5/21

N2 - Current motion systems in lithography machines operate at a bus voltage of 600V after a steady increase in the past decades. Increasing the voltage has the advantage of delivering more power without the cost of an increase in mass and volume of power cables.However, this requires a significant breakthrough in power amplifier technology since fast switching MOSFETs can only be used reliably up to 600 V and for higher voltages only slower switching devices are available.

AB - Current motion systems in lithography machines operate at a bus voltage of 600V after a steady increase in the past decades. Increasing the voltage has the advantage of delivering more power without the cost of an increase in mass and volume of power cables.However, this requires a significant breakthrough in power amplifier technology since fast switching MOSFETs can only be used reliably up to 600 V and for higher voltages only slower switching devices are available.

KW - High Voltage

KW - Power electronics

M3 - Poster

T2 - IEEE Western European Student and Young Professional congress (WESYP), May 20-24, 2015, Eindhoven, The Netherlands.

Y2 - 20 May 2015 through 24 May 2015

ER -

High-Voltage Actuation System for Future Generation Lithography systems - Power Amplifier

Abstract

Conference

Keywords

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Cite this