High-Voltage Actuation System for Future Generation Lithography systems - Power Amplifier

Research output: Contribution to conferencePosterAcademic

Abstract

Current motion systems in lithography machines operate at a bus voltage of 600V after a steady increase in the past decades. Increasing the voltage has the advantage of delivering more power without the cost of an increase in mass and volume of power cables.
However, this requires a significant breakthrough in power amplifier technology since fast switching MOSFETs can only be used reliably up to 600 V and for higher voltages only slower switching devices are available.

Conference

ConferenceIEEE Western European Student and Young Professional congress (WESYP), May 20-24, 2015, Eindhoven, The Netherlands.
Abbreviated titleWESYP
CountryNetherlands
CityEindhoven
Period20/05/1524/05/15

Fingerprint

Power amplifiers
Lithography
Electric potential
Cables
Costs

Keywords

  • High Voltage
  • Power electronics

Cite this

Settels, S. J., Everts, J., van Duivenbode, J., & Lomonova, E. (2015). High-Voltage Actuation System for Future Generation Lithography systems - Power Amplifier. Poster session presented at IEEE Western European Student and Young Professional congress (WESYP), May 20-24, 2015, Eindhoven, The Netherlands., Eindhoven, Netherlands.
Settels, S.J. ; Everts, J. ; van Duivenbode, J. ; Lomonova, E./ High-Voltage Actuation System for Future Generation Lithography systems - Power Amplifier. Poster session presented at IEEE Western European Student and Young Professional congress (WESYP), May 20-24, 2015, Eindhoven, The Netherlands., Eindhoven, Netherlands.
@conference{772f8c33a04d4ce6a3b55355613ebd65,
title = "High-Voltage Actuation System for Future Generation Lithography systems - Power Amplifier",
abstract = "Current motion systems in lithography machines operate at a bus voltage of 600V after a steady increase in the past decades. Increasing the voltage has the advantage of delivering more power without the cost of an increase in mass and volume of power cables.However, this requires a significant breakthrough in power amplifier technology since fast switching MOSFETs can only be used reliably up to 600 V and for higher voltages only slower switching devices are available.",
keywords = "High Voltage, Power electronics",
author = "S.J. Settels and J. Everts and {van Duivenbode}, J. and E. Lomonova",
year = "2015",
month = "5",
day = "21",
language = "English",
note = "IEEE Western European Student and Young Professional congress (WESYP), May 20-24, 2015, Eindhoven, The Netherlands., WESYP ; Conference date: 20-05-2015 Through 24-05-2015",

}

Settels, SJ, Everts, J, van Duivenbode, J & Lomonova, E 2015, 'High-Voltage Actuation System for Future Generation Lithography systems - Power Amplifier' IEEE Western European Student and Young Professional congress (WESYP), May 20-24, 2015, Eindhoven, The Netherlands., Eindhoven, Netherlands, 20/05/15 - 24/05/15, .

High-Voltage Actuation System for Future Generation Lithography systems - Power Amplifier. / Settels, S.J.; Everts, J.; van Duivenbode, J.; Lomonova, E.

2015. Poster session presented at IEEE Western European Student and Young Professional congress (WESYP), May 20-24, 2015, Eindhoven, The Netherlands., Eindhoven, Netherlands.

Research output: Contribution to conferencePosterAcademic

TY - CONF

T1 - High-Voltage Actuation System for Future Generation Lithography systems - Power Amplifier

AU - Settels,S.J.

AU - Everts,J.

AU - van Duivenbode,J.

AU - Lomonova,E.

PY - 2015/5/21

Y1 - 2015/5/21

N2 - Current motion systems in lithography machines operate at a bus voltage of 600V after a steady increase in the past decades. Increasing the voltage has the advantage of delivering more power without the cost of an increase in mass and volume of power cables.However, this requires a significant breakthrough in power amplifier technology since fast switching MOSFETs can only be used reliably up to 600 V and for higher voltages only slower switching devices are available.

AB - Current motion systems in lithography machines operate at a bus voltage of 600V after a steady increase in the past decades. Increasing the voltage has the advantage of delivering more power without the cost of an increase in mass and volume of power cables.However, this requires a significant breakthrough in power amplifier technology since fast switching MOSFETs can only be used reliably up to 600 V and for higher voltages only slower switching devices are available.

KW - High Voltage

KW - Power electronics

M3 - Poster

ER -

Settels SJ, Everts J, van Duivenbode J, Lomonova E. High-Voltage Actuation System for Future Generation Lithography systems - Power Amplifier. 2015. Poster session presented at IEEE Western European Student and Young Professional congress (WESYP), May 20-24, 2015, Eindhoven, The Netherlands., Eindhoven, Netherlands.