High-Voltage Actuation System for Future Generation Lithography systems - Power Amplifier

S.J. Settels, J. Everts, J. van Duivenbode, E. Lomonova

Research output: Contribution to conferencePosterAcademic

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Abstract

Current motion systems in lithography machines operate at a bus voltage of 600V after a steady increase in the past decades. Increasing the voltage has the advantage of delivering more power without the cost of an increase in mass and volume of power cables.
However, this requires a significant breakthrough in power amplifier technology since fast switching MOSFETs can only be used reliably up to 600 V and for higher voltages only slower switching devices are available.
Original languageEnglish
Publication statusPublished - 21 May 2015
EventIEEE Western European Student and Young Professional congress (WESYP), May 20-24, 2015, Eindhoven, The Netherlands. - Eindhoven, Netherlands
Duration: 20 May 201524 May 2015

Conference

ConferenceIEEE Western European Student and Young Professional congress (WESYP), May 20-24, 2015, Eindhoven, The Netherlands.
Abbreviated titleWESYP
CountryNetherlands
CityEindhoven
Period20/05/1524/05/15

Keywords

  • High Voltage
  • Power electronics

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