High resolution grating antennas for beam steering on the IMOS platform

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Abstract

We propose to use SiO2 gratings on the InP membrane on silicon (IMOS) platform to form ultra-weak grating-based antennas for generation of ultra-narrow free-space optical beams. Such long gratings can produce narrow beam widths of below 0.1°. By using selective dry etching, both the grating shape and the etch depth have been precisely controlled, yielding a highly robust fabrication process. Initial results have shown a 0.088° FWHM of the emitted beam in the far-field for a 1-mm antenna length.
Original languageEnglish
Title of host publicationProceedings Asia Communications and Photonics Conference (ACPC) 2019
PublisherOSA Publishing
Number of pages3
Publication statusPublished - 2 Nov 2019
EventAsia Communications and Photonics Conference (ACPC) 2019 - Chengdu, China
Duration: 2 Nov 20195 Nov 2019

Conference

ConferenceAsia Communications and Photonics Conference (ACPC) 2019
Abbreviated titleACPC 2019
CountryChina
CityChengdu
Period2/11/195/11/19

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Wang, Y., van Engelen, J. P., Reniers, S., van Rijn, M., Zhang, X., Cao, Z., ... Jiao, Y. (2019). High resolution grating antennas for beam steering on the IMOS platform. In Proceedings Asia Communications and Photonics Conference (ACPC) 2019 [M4B.5] OSA Publishing.