High-resolution elastic recoil depth profiling using alpha-particle beams: CERDA-TOF

S.S. Klein, H.A. Rijken, P.W.L. van Dijk, M.J.A. de Voigt

    Research output: Contribution to journalArticleAcademicpeer-review

    2 Citations (Scopus)

    Abstract

    An improved coincidence time-of-flight recoil spectrometer is described. The use of alpha-particles instead of heavy ions to eject the recoils has the advantages of larger depth range and smaller target damage. Multi-element analysis and element-selective depth profiling on thin and moderately thick targets are demonstrated. A surface depth resolution of 3 nm has been obtained for 12C in carbon at a recoil angle φ of 30°. Resolution down to 1 nm is predicted when further compensation of kinematic effects is realized; using very well defined beams it might be possible to obtain atomic layer resolution. Strategies to extend the present sensitivity of about 1014 atoms cm2 by one or two orders of magnitude are discussed.

    Original languageEnglish
    Pages (from-to)655-659
    Number of pages5
    JournalNuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Volume85
    Issue number1-4
    DOIs
    Publication statusPublished - 2 Mar 1994

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