High rate plasma deposition of thin films for solar cell applications

M.C.M. Sanden, van der, I. Volintiru, M. Creatore, J.L. Linden, B. Hoex, P.J. Oever, van den, R.C.M. Bosch, R. Erven, van, M.D. Bijker, M. Evers, W.M.M. Kessels

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationInternational symposium on inorganic and environmental materials 2004 : October 18-21, 2004, Eindhoven, The Netherlands : abstracts
Publication statusPublished - 2004

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