High rate plasma deposition of silicon oxide like films

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	van de Sanden, M.C.M. (Richard), Promotor Schram, Daan C., Promotor
Award date	27 Aug 2002
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	90-386-2009-8
DOIs	https://doi.org/10.6100/IR557875
Publication status	Published - 2002

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@phdthesis{5afa5c449c094f308ebe17e20706833a,

title = "High rate plasma deposition of silicon oxide like films",

author = "\{Hest, van\}, M.F.A.M.",

year = "2002",

doi = "10.6100/IR557875",

language = "English",

isbn = "90-386-2009-8",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}