High-rate deposition of silicon nitride films for photovoltaic applications : plasma chemistry and film properties

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	MRS spring meeting 2001, April 16-20, San Francisco, abstracts
Pages	18
Publication status	Published - 2001

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@inproceedings{5afa8d107acd46fc82d8cd2f4c545475,

title = "High-rate deposition of silicon nitride films for photovoltaic applications : plasma chemistry and film properties",

author = "W.M.M. Kessels and {Assche, van}, F.J.H. and D.C. Schram and {Sanden, van de}, M.C.M.",

year = "2001",

language = "English",

pages = "18",

booktitle = "MRS spring meeting 2001, April 16-20, San Francisco, abstracts",

}