High rate deposition of hard hydrogenated amorphous carbon for tribologic applications

T. Zaharia; S.V. Singh; M. Creatore; R. Groenen; K. van Hege; M.C.M. Sanden, van de

High rate deposition of hard hydrogenated amorphous carbon for tribologic applications

T. Zaharia
, S.V. Singh
, M. Creatore
, R. Groenen
, K. van Hege
, M.C.M. Sanden, van de

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

2 Downloads (Pure)

Original language	English
Title of host publication	Proceedings of ICTF14 & RSD2008 : Ghent, Belgium, 17-20 November 2008
Editors	R. De Gryse, D. Depla, D. Poelman, S. Mathieu, W.P. Leroy, H. Poelman
Place of Publication	Ghent
Pages	117-117
Publication status	Published - 2008
Event	conference; International Conference on Thin Films (ICTF), Ghent Reactive Sputter Deposition Symposium (RSD); 2008-11-17; 2008-11-20 - Duration: 17 Nov 2008 → 20 Nov 2008

Conference

Conference	conference; International Conference on Thin Films (ICTF), Ghent Reactive Sputter Deposition Symposium (RSD); 2008-11-17; 2008-11-20
Period	17/11/08 → 20/11/08
Other	International Conference on Thin Films (ICTF), Ghent Reactive Sputter Deposition Symposium (RSD)

Cite this

@inproceedings{4a92ca6543404438a742f82d109f4ce7,

title = "High rate deposition of hard hydrogenated amorphous carbon for tribologic applications",

author = "T. Zaharia and S.V. Singh and M. Creatore and R. Groenen and \{van Hege\}, K. and \{Sanden, van de\}, M.C.M.",

year = "2008",

language = "English",

isbn = "978-90-334-7347-0",

pages = "117--117",

editor = "\{De Gryse\}, R. and D. Depla and D. Poelman and S. Mathieu and W.P. Leroy and H. Poelman",

booktitle = "Proceedings of ICTF14 \& RSD2008 : Ghent, Belgium, 17-20 November 2008",

note = "conference; International Conference on Thin Films (ICTF), Ghent Reactive Sputter Deposition Symposium (RSD); 2008-11-17; 2008-11-20 ; Conference date: 17-11-2008 Through 20-11-2008",

}

Zaharia, T, Singh, SV, Creatore, M, Groenen, R, van Hege, K & Sanden, van de, MCM 2008, High rate deposition of hard hydrogenated amorphous carbon for tribologic applications. in R De Gryse, D Depla, D Poelman, S Mathieu, WP Leroy & H Poelman (eds), Proceedings of ICTF14 & RSD2008 : Ghent, Belgium, 17-20 November 2008. Ghent, pp. 117-117, conference; International Conference on Thin Films (ICTF), Ghent Reactive Sputter Deposition Symposium (RSD); 2008-11-17; 2008-11-20, 17/11/08.

High rate deposition of hard hydrogenated amorphous carbon for tribologic applications. / Zaharia, T.; Singh, S.V.; Creatore, M. et al.
Proceedings of ICTF14 & RSD2008 : Ghent, Belgium, 17-20 November 2008. ed. / R. De Gryse; D. Depla; D. Poelman; S. Mathieu; W.P. Leroy; H. Poelman. Ghent, 2008. p. 117-117.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - High rate deposition of hard hydrogenated amorphous carbon for tribologic applications

AU - Zaharia, T.

AU - Singh, S.V.

AU - Creatore, M.

AU - Groenen, R.

AU - van Hege, K.

AU - Sanden, van de, M.C.M.

PY - 2008

Y1 - 2008

M3 - Conference contribution

SN - 978-90-334-7347-0

SP - 117

EP - 117

BT - Proceedings of ICTF14 & RSD2008 : Ghent, Belgium, 17-20 November 2008

A2 - De Gryse, R.

A2 - Depla, D.

A2 - Poelman, D.

A2 - Mathieu, S.

A2 - Leroy, W.P.

A2 - Poelman, H.

CY - Ghent

T2 - conference; International Conference on Thin Films (ICTF), Ghent Reactive Sputter Deposition Symposium (RSD); 2008-11-17; 2008-11-20

Y2 - 17 November 2008 through 20 November 2008

ER -

High rate deposition of hard hydrogenated amorphous carbon for tribologic applications

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