High rate deposition of DLC : plasma chemistry and film properties

M.C.M. Sanden, van de

Research output: Contribution to conference › Other › Academic

Original languageEnglish
Publication statusPublished - 2005
Eventconference; Antwerp University; 2005-05-13; 2005-05-13 -
Duration: 13 May 2005 → 13 May 2005

Conference

Conferenceconference; Antwerp University; 2005-05-13; 2005-05-13
Period13/05/05 → 13/05/05
OtherAntwerp University

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