High rate deposition of DLC : plasma chemistry and film properties

Research output: Contribution to conferenceOtherAcademic

Original languageEnglish
Publication statusPublished - 2005
Eventconference; Antwerp University; 2005-05-13; 2005-05-13 -
Duration: 13 May 200513 May 2005

Conference

Conferenceconference; Antwerp University; 2005-05-13; 2005-05-13
Period13/05/0513/05/05
OtherAntwerp University

Cite this

Sanden, van de, M. C. M. (2005). High rate deposition of DLC : plasma chemistry and film properties. conference; Antwerp University; 2005-05-13; 2005-05-13, .
Sanden, van de, M.C.M. / High rate deposition of DLC : plasma chemistry and film properties. conference; Antwerp University; 2005-05-13; 2005-05-13, .
@conference{17f3cdeb5b324f8c94ee3e6b645599d3,
title = "High rate deposition of DLC : plasma chemistry and film properties",
author = "{Sanden, van de}, M.C.M.",
year = "2005",
language = "English",
note = "conference; Antwerp University; 2005-05-13; 2005-05-13 ; Conference date: 13-05-2005 Through 13-05-2005",

}

Sanden, van de, MCM 2005, 'High rate deposition of DLC : plasma chemistry and film properties' conference; Antwerp University; 2005-05-13; 2005-05-13, 13/05/05 - 13/05/05, .

High rate deposition of DLC : plasma chemistry and film properties. / Sanden, van de, M.C.M.

2005. conference; Antwerp University; 2005-05-13; 2005-05-13, .

Research output: Contribution to conferenceOtherAcademic

TY - CONF

T1 - High rate deposition of DLC : plasma chemistry and film properties

AU - Sanden, van de, M.C.M.

PY - 2005

Y1 - 2005

M3 - Other

ER -

Sanden, van de MCM. High rate deposition of DLC : plasma chemistry and film properties. 2005. conference; Antwerp University; 2005-05-13; 2005-05-13, .