High rate deposition of DLC : plasma chemistry and film properties

Research output: Contribution to conferenceOther

Original languageEnglish
Publication statusPublished - 2005
Eventconference; Antwerp University; 2005-05-13; 2005-05-13 -
Duration: 13 May 200513 May 2005

Conference

Conferenceconference; Antwerp University; 2005-05-13; 2005-05-13
Period13/05/0513/05/05
OtherAntwerp University

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