Abstract
The feasibility of the new 'Expanding Thermal Plasma' technique for the deposition of a-SiNx:H at high deposition rates (typically ∼200 Å/s) has been investigated. The structural film properties of the a-SiNx:H are reported for various process conditions and the application of the material as antireflection coating on (multi)crystalline silicon solar cells is studied. Furthermore, the performance of the material for surface and bulk passivation is investigated.
Original language | English |
---|---|
Title of host publication | Amorphous and heterogeneous silicon-based films - 2001 : symposium held [at the 2001 MRS spring meeting,] April 16 - 20, 2001, San Francisco, California, U.S.A. |
Editors | M. Stutzmann, J.B. Boyce, J.D. Cohen, xx et al. |
Place of Publication | Warrendale, PA, USA |
Publisher | Materials Research Society |
Number of pages | 6 |
ISBN (Print) | 1-558-99600-1 |
DOIs | |
Publication status | Published - 1 Dec 2001 |
Event | 2001MRS Spring Meeting & Exhibit - San Francisco, United States Duration: 16 Apr 2001 → 20 Apr 2001 https://www.mrs.org/spring2001 |
Publication series
Name | Materials Research Society Symposium Proceedings |
---|---|
Volume | 664 |
ISSN (Print) | 0272-9172 |
Conference
Conference | 2001MRS Spring Meeting & Exhibit |
---|---|
Country/Territory | United States |
City | San Francisco |
Period | 16/04/01 → 20/04/01 |
Other | |
Internet address |
Funding
Dr. F.M. Schuurmans from Shell Solar Energy B.V. and Dr. A.W. Weeber and Dr. W.J. Soppe of the Netherlands Energy Research Foundation are acknowledged for the experiments on mc-Si solar cells. Dr. W. Arnold Bik of the Utrecht University is greatly acknowledged for the ERD analysis. This work is partly performed within the ‘Sunovation’ project.