High rate a-Si:H growth studied by in situ ellipsometry

A.H.M. Smets; B.A. Korevaar; W.M.M. Kessels; M.C.M. Sanden, van de; D.C. Schram

High rate a-Si:H growth studied by in situ ellipsometry

A.H.M. Smets, B.A. Korevaar, W.M.M. Kessels, M.C.M. Sanden, van de, D.C. Schram

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	Presentation at the AVS, American Vacuum Society : 46th international symposium, Seattle, October 25-29, 1999 : virtual proceedings
Pages	TF-MoM6-
Publication status	Published - 1999
Event	46th International Symposium American Vacuum Society - Seattle, United States Duration: 25 Oct 1999 → 29 Oct 1999

Conference

Conference	46th International Symposium American Vacuum Society
Abbreviated title	AVS 46
Country/Territory	United States
City	Seattle
Period	25/10/99 → 29/10/99

Cite this

@inproceedings{7a15a746e2c742159d9ffe9576769692,

title = "High rate a-Si:H growth studied by in situ ellipsometry",

author = "A.H.M. Smets and B.A. Korevaar and W.M.M. Kessels and {Sanden, van de}, M.C.M. and D.C. Schram",

year = "1999",

language = "English",

pages = "TF--MoM6--",

booktitle = "Presentation at the AVS, American Vacuum Society : 46th international symposium, Seattle, October 25-29, 1999 : virtual proceedings",

note = "46th International Symposium American Vacuum Society, AVS 46 ; Conference date: 25-10-1999 Through 29-10-1999",

}

Smets, AHM, Korevaar, BA, Kessels, WMM , Sanden, van de, MCM & Schram, DC 1999, High rate a-Si:H growth studied by in situ ellipsometry. in Presentation at the AVS, American Vacuum Society : 46th international symposium, Seattle, October 25-29, 1999 : virtual proceedings. pp. TF-MoM6-, 46th International Symposium American Vacuum Society, Seattle, United States, 25/10/99.

High rate a-Si:H growth studied by in situ ellipsometry. / Smets, A.H.M.; Korevaar, B.A.; Kessels, W.M.M.; Sanden, van de, M.C.M.; Schram, D.C.

Presentation at the AVS, American Vacuum Society : 46th international symposium, Seattle, October 25-29, 1999 : virtual proceedings. 1999. p. TF-MoM6-.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - High rate a-Si:H growth studied by in situ ellipsometry

AU - Smets, A.H.M.

AU - Korevaar, B.A.

AU - Kessels, W.M.M.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

PY - 1999

Y1 - 1999

M3 - Conference contribution

SP - TF-MoM6-

BT - Presentation at the AVS, American Vacuum Society : 46th international symposium, Seattle, October 25-29, 1999 : virtual proceedings

T2 - 46th International Symposium American Vacuum Society

Y2 - 25 October 1999 through 29 October 1999

ER -