High rate a-Si:H growth studied by in situ ellipsometry

A.H.M. Smets, B.A. Korevaar, W.M.M. Kessels, M.C.M. Sanden, van de, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationPresentation at the AVS, American Vacuum Society : 46th international symposium, Seattle, October 25-29, 1999 : virtual proceedings
PagesTF-MoM6-
Publication statusPublished - 1999
Event46th International Symposium American Vacuum Society - Seattle, United States
Duration: 25 Oct 199929 Oct 1999

Conference

Conference46th International Symposium American Vacuum Society
Abbreviated titleAVS 46
Country/TerritoryUnited States
CitySeattle
Period25/10/9929/10/99

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