@inproceedings{7a15a746e2c742159d9ffe9576769692,
title = "High rate a-Si:H growth studied by in situ ellipsometry",
author = "A.H.M. Smets and B.A. Korevaar and W.M.M. Kessels and {Sanden, van de}, M.C.M. and D.C. Schram",
year = "1999",
language = "English",
pages = "TF--MoM6--",
booktitle = "Presentation at the AVS, American Vacuum Society : 46th international symposium, Seattle, October 25-29, 1999 : virtual proceedings",
note = "46th International Symposium American Vacuum Society, AVS 46 ; Conference date: 25-10-1999 Through 29-10-1999",
}