TY - JOUR
T1 - High quality SiO2-like layers by large area atmospheric pressure plasma enhanced CVD : Deposition process studies by surface analysis
AU - Premkumar, P.A.
AU - Starostin, S.A.
AU - Vries, de, Hinrik
AU - Paffen, R.M.J.
AU - Creatore, M.
AU - Eijkemans, T.J.
AU - Koenraad, P.M.
AU - Sanden, van de, M.C.M.
PY - 2009
Y1 - 2009
N2 - This work reports on the main competing processes and their contribution to the properties of SiO2 layers on polymers in large area AP-PE-CVD from Ar-N2-O2-HMDSO mixtures. The detailed space resolved surface analysis on the statically deposited films showed smooth SiOx films in the vicinity of the gas injection, as deposited by HMDSO radicals. At the gas effluent, due to HMDSO depletion, non-depositing species interact with the polymer and induce rough deposits with high carbon content. The competition of plasma-polymer surface interaction with HMDSO radicals deposition, is further confirmed from the analysis of films grown on polymers with a "protecting" layer and with reverse gas flow direction. Under web roll conditions, HMDSO radicals deposition is dominant, resulting in high quality SiOx layers along the whole electrode length. © 2009 WILEY-VCH Verlag GmbH & Co. KGaA.
AB - This work reports on the main competing processes and their contribution to the properties of SiO2 layers on polymers in large area AP-PE-CVD from Ar-N2-O2-HMDSO mixtures. The detailed space resolved surface analysis on the statically deposited films showed smooth SiOx films in the vicinity of the gas injection, as deposited by HMDSO radicals. At the gas effluent, due to HMDSO depletion, non-depositing species interact with the polymer and induce rough deposits with high carbon content. The competition of plasma-polymer surface interaction with HMDSO radicals deposition, is further confirmed from the analysis of films grown on polymers with a "protecting" layer and with reverse gas flow direction. Under web roll conditions, HMDSO radicals deposition is dominant, resulting in high quality SiOx layers along the whole electrode length. © 2009 WILEY-VCH Verlag GmbH & Co. KGaA.
U2 - 10.1002/ppap.200900033
DO - 10.1002/ppap.200900033
M3 - Article
VL - 6
SP - 693
EP - 702
JO - Plasma Processes and Polymers
JF - Plasma Processes and Polymers
SN - 1612-8850
IS - 10
ER -