High quality a-Si:H grown at high rate using an expanding thermal plasma

R.J. Severens, J. Bastiaanssen, M.C.M. Sanden, van de, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

66 Downloads (Pure)
Original languageEnglish
Title of host publicationPSE : Plasma surface engineering : 5th international conference, Garmisch-Partenkrichen, September 9-13, 1996, abstracts
Pages131
Publication statusPublished - 1996

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