High-Q collective Mie resonances in monocrystalline silicon nanoantenna arrays for the visible light

Zhenghe Zhang; Pengbo Liu; Wanli Lu; Ping Bai; Bingchang Zhang; Zefeng Chen; Stefan A. Maier; Jaime Gómez Rivas; Shaojun Wang; Xiaofeng Li

doi:10.1016/j.fmre.2022.05.020

High-Q collective Mie resonances in monocrystalline silicon nanoantenna arrays for the visible light

Zhenghe Zhang, Pengbo Liu, Wanli Lu, Ping Bai, Bingchang Zhang, Zefeng Chen, Stefan A. Maier, Jaime Gómez Rivas, Shaojun Wang (Corresponding author), Xiaofeng Li (Corresponding author)

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Abstract

Dielectric optical antennas have emerged as a promising nanophotonic architecture for manipulating the propagation and localization of light. However, the optically induced Mie resonances in an isolated nanoantenna are normally with broad spectra and poor Q-factors, limiting their performances in sensing, lasing, and nonlinear optics. Here, we dramatically enhance the Q-factors of Mie resonances in silicon (Si) nanoparticles across the optical band by arranging the nanoparticles in a periodic lattice. We select monocrystalline Si with negligible material losses and develop a unique method to fabricate nanoparticle arrays on a quartz substrate. By extinction dispersion measurements and electromagnetic analysis, we can identify three types of collective Mie resonances with Q-factors ∼ 500 in the same nanocylinder arrays, including surface lattice resonances, bound states in the continuum, and quasi-guided modes. Our work paves the way for fundamental research in strong light-matter interactions and the design of highly efficient light-emitting metasurfaces.

Original language	English
Pages (from-to)	822-830
Number of pages	9
Journal	Fundamental Research
Volume	3
Issue number	5
DOIs	https://doi.org/10.1016/j.fmre.2022.05.020
Publication status	Published - Sept 2023

Bibliographical note

Funding Information:
We thank the technique support from Prof. Wen Qiao, Prof. Cheng Zhang, Liujing Li, Prof. Peng Li, and Prof. Wei Wang. We also thank the helpful discussion with Prof. Shunsuke Murai of the Kyoto University of Japan. This work was financially supported by the National Natural Science Foundation of China (Grants No. 62120106001, 61875143, and 62104165), the Natural Science Foundation of Jiangsu Province (Grants No. BK20200859, BK20200857, and BK20210713), and the Priority Academic Program Development (PAPD) of Jiangsu Higher Education Institutions. JGR and PB also acknowledge financial support from Nederlandse Organisatie voor Wetenschappelijk Onderzoek (NWO) (Vici Grant No. 680-47-628).

Funding Information:
We thank the technique support from Prof. Wen Qiao, Prof. Cheng Zhang, Liujing Li, Prof. Peng Li, and Prof. Wei Wang. We also thank the helpful discussion with Prof. Shunsuke Murai of the Kyoto University of Japan. This work was financially supported by the National Natural Science Foundation of China (Grants No. 62120106001, 61875143, and 62104165), the Natural Science Foundation of Jiangsu Province (Grants No. BK20200859, BK20200857, and BK20210713), and the Priority Academic Program Development (PAPD) of Jiangsu Higher Education Institutions. JGR and PB also acknowledge financial support from Nederlandse Organisatie voor Wetenschappelijk Onderzoek (NWO) (Vici Grant No. 680-47-628).

Funding

We thank the technique support from Prof. Wen Qiao, Prof. Cheng Zhang, Liujing Li, Prof. Peng Li, and Prof. Wei Wang. We also thank the helpful discussion with Prof. Shunsuke Murai of the Kyoto University of Japan. This work was financially supported by the National Natural Science Foundation of China (Grants No. 62120106001, 61875143, and 62104165), the Natural Science Foundation of Jiangsu Province (Grants No. BK20200859, BK20200857, and BK20210713), and the Priority Academic Program Development (PAPD) of Jiangsu Higher Education Institutions. JGR and PB also acknowledge financial support from Nederlandse Organisatie voor Wetenschappelijk Onderzoek (NWO) (Vici Grant No. 680-47-628). We thank the technique support from Prof. Wen Qiao, Prof. Cheng Zhang, Liujing Li, Prof. Peng Li, and Prof. Wei Wang. We also thank the helpful discussion with Prof. Shunsuke Murai of the Kyoto University of Japan. This work was financially supported by the National Natural Science Foundation of China (Grants No. 62120106001, 61875143, and 62104165), the Natural Science Foundation of Jiangsu Province (Grants No. BK20200859, BK20200857, and BK20210713), and the Priority Academic Program Development (PAPD) of Jiangsu Higher Education Institutions. JGR and PB also acknowledge financial support from Nederlandse Organisatie voor Wetenschappelijk Onderzoek (NWO) (Vici Grant No. 680-47-628).

Keywords

Bound states in the continuum
Dielectric resonators
Nanophotonics
Quasi-guided modes
Surface lattice resonances

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title = "High-Q collective Mie resonances in monocrystalline silicon nanoantenna arrays for the visible light",

abstract = "Dielectric optical antennas have emerged as a promising nanophotonic architecture for manipulating the propagation and localization of light. However, the optically induced Mie resonances in an isolated nanoantenna are normally with broad spectra and poor Q-factors, limiting their performances in sensing, lasing, and nonlinear optics. Here, we dramatically enhance the Q-factors of Mie resonances in silicon (Si) nanoparticles across the optical band by arranging the nanoparticles in a periodic lattice. We select monocrystalline Si with negligible material losses and develop a unique method to fabricate nanoparticle arrays on a quartz substrate. By extinction dispersion measurements and electromagnetic analysis, we can identify three types of collective Mie resonances with Q-factors ∼ 500 in the same nanocylinder arrays, including surface lattice resonances, bound states in the continuum, and quasi-guided modes. Our work paves the way for fundamental research in strong light-matter interactions and the design of highly efficient light-emitting metasurfaces.",

keywords = "Bound states in the continuum, Dielectric resonators, Nanophotonics, Quasi-guided modes, Surface lattice resonances",

author = "Zhenghe Zhang and Pengbo Liu and Wanli Lu and Ping Bai and Bingchang Zhang and Zefeng Chen and Maier, \{Stefan A.\} and \{G{\'o}mez Rivas\}, Jaime and Shaojun Wang and Xiaofeng Li",

note = "Funding Information: We thank the technique support from Prof. Wen Qiao, Prof. Cheng Zhang, Liujing Li, Prof. Peng Li, and Prof. Wei Wang. We also thank the helpful discussion with Prof. Shunsuke Murai of the Kyoto University of Japan. This work was financially supported by the National Natural Science Foundation of China (Grants No. 62120106001, 61875143, and 62104165), the Natural Science Foundation of Jiangsu Province (Grants No. BK20200859, BK20200857, and BK20210713), and the Priority Academic Program Development (PAPD) of Jiangsu Higher Education Institutions. JGR and PB also acknowledge financial support from Nederlandse Organisatie voor Wetenschappelijk Onderzoek (NWO) (Vici Grant No. 680-47-628). Funding Information: We thank the technique support from Prof. Wen Qiao, Prof. Cheng Zhang, Liujing Li, Prof. Peng Li, and Prof. Wei Wang. We also thank the helpful discussion with Prof. Shunsuke Murai of the Kyoto University of Japan. This work was financially supported by the National Natural Science Foundation of China (Grants No. 62120106001, 61875143, and 62104165), the Natural Science Foundation of Jiangsu Province (Grants No. BK20200859, BK20200857, and BK20210713), and the Priority Academic Program Development (PAPD) of Jiangsu Higher Education Institutions. JGR and PB also acknowledge financial support from Nederlandse Organisatie voor Wetenschappelijk Onderzoek (NWO) (Vici Grant No. 680-47-628). ",

year = "2023",

month = sep,

doi = "10.1016/j.fmre.2022.05.020",

language = "English",

volume = "3",

pages = "822--830",

journal = "Fundamental Research",

issn = "2096-9457",

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T1 - High-Q collective Mie resonances in monocrystalline silicon nanoantenna arrays for the visible light

AU - Zhang, Zhenghe

AU - Liu, Pengbo

AU - Lu, Wanli

AU - Bai, Ping

AU - Zhang, Bingchang

AU - Chen, Zefeng

AU - Maier, Stefan A.

AU - Gómez Rivas, Jaime

AU - Wang, Shaojun

AU - Li, Xiaofeng

N1 - Funding Information: We thank the technique support from Prof. Wen Qiao, Prof. Cheng Zhang, Liujing Li, Prof. Peng Li, and Prof. Wei Wang. We also thank the helpful discussion with Prof. Shunsuke Murai of the Kyoto University of Japan. This work was financially supported by the National Natural Science Foundation of China (Grants No. 62120106001, 61875143, and 62104165), the Natural Science Foundation of Jiangsu Province (Grants No. BK20200859, BK20200857, and BK20210713), and the Priority Academic Program Development (PAPD) of Jiangsu Higher Education Institutions. JGR and PB also acknowledge financial support from Nederlandse Organisatie voor Wetenschappelijk Onderzoek (NWO) (Vici Grant No. 680-47-628). Funding Information: We thank the technique support from Prof. Wen Qiao, Prof. Cheng Zhang, Liujing Li, Prof. Peng Li, and Prof. Wei Wang. We also thank the helpful discussion with Prof. Shunsuke Murai of the Kyoto University of Japan. This work was financially supported by the National Natural Science Foundation of China (Grants No. 62120106001, 61875143, and 62104165), the Natural Science Foundation of Jiangsu Province (Grants No. BK20200859, BK20200857, and BK20210713), and the Priority Academic Program Development (PAPD) of Jiangsu Higher Education Institutions. JGR and PB also acknowledge financial support from Nederlandse Organisatie voor Wetenschappelijk Onderzoek (NWO) (Vici Grant No. 680-47-628).

PY - 2023/9

Y1 - 2023/9

N2 - Dielectric optical antennas have emerged as a promising nanophotonic architecture for manipulating the propagation and localization of light. However, the optically induced Mie resonances in an isolated nanoantenna are normally with broad spectra and poor Q-factors, limiting their performances in sensing, lasing, and nonlinear optics. Here, we dramatically enhance the Q-factors of Mie resonances in silicon (Si) nanoparticles across the optical band by arranging the nanoparticles in a periodic lattice. We select monocrystalline Si with negligible material losses and develop a unique method to fabricate nanoparticle arrays on a quartz substrate. By extinction dispersion measurements and electromagnetic analysis, we can identify three types of collective Mie resonances with Q-factors ∼ 500 in the same nanocylinder arrays, including surface lattice resonances, bound states in the continuum, and quasi-guided modes. Our work paves the way for fundamental research in strong light-matter interactions and the design of highly efficient light-emitting metasurfaces.

AB - Dielectric optical antennas have emerged as a promising nanophotonic architecture for manipulating the propagation and localization of light. However, the optically induced Mie resonances in an isolated nanoantenna are normally with broad spectra and poor Q-factors, limiting their performances in sensing, lasing, and nonlinear optics. Here, we dramatically enhance the Q-factors of Mie resonances in silicon (Si) nanoparticles across the optical band by arranging the nanoparticles in a periodic lattice. We select monocrystalline Si with negligible material losses and develop a unique method to fabricate nanoparticle arrays on a quartz substrate. By extinction dispersion measurements and electromagnetic analysis, we can identify three types of collective Mie resonances with Q-factors ∼ 500 in the same nanocylinder arrays, including surface lattice resonances, bound states in the continuum, and quasi-guided modes. Our work paves the way for fundamental research in strong light-matter interactions and the design of highly efficient light-emitting metasurfaces.

KW - Bound states in the continuum

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KW - Nanophotonics

KW - Quasi-guided modes

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DO - 10.1016/j.fmre.2022.05.020

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SN - 2096-9457

VL - 3

SP - 822

EP - 830

JO - Fundamental Research

JF - Fundamental Research

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ER -

High-Q collective Mie resonances in monocrystalline silicon nanoantenna arrays for the visible light

Abstract

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Keywords

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