High-Q BAW resonator on Pt/Ta2O5/SiO2 based reflector stack

J.W. Lobeek; R.C. Strijbos; A. Jansman; N. Xin Li; A.B. Smolders; N.J. Pulsford

doi:10.1109/MWSYM.2007.380253

High-Q BAW resonator on Pt/Ta2O5/SiO2 based reflector stack

J.W. Lobeek, R.C. Strijbos, A. Jansman, N. Xin Li, A.B. Smolders, N.J. Pulsford

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

This paper discusses the design and optimization of high-Q Bulk-Acoustic-Wave resonators using a Pt/Ta2O5/SiO2 reflector stack. It can be shown that by properly designing the reflector stack and boundary conditions, large performance improvements can be realized. In this paper the characterization and design of the reflector stack is described and its results are presented.

Original language	English
Title of host publication	Proceedings of the 2007 IEEE/MTT-S International Microwave Symposium, 3-8 June 2007, Honolulu, Hawai
Place of Publication	Piscataway
Publisher	Institute of Electrical and Electronics Engineers
Pages	2047-2050
DOIs	https://doi.org/10.1109/MWSYM.2007.380253
Publication status	Published - 2007
Event	conference; IEEE MTT Symposium 2007, Honolulu - Duration: 1 Jan 2007 → …

Conference

Conference	conference; IEEE MTT Symposium 2007, Honolulu
Period	1/01/07 → …
Other	IEEE MTT Symposium 2007, Honolulu

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Lobeek, J. W., Strijbos, R. C., Jansman, A., Xin Li, N., Smolders, A. B., & Pulsford, N. J. (2007). High-Q BAW resonator on Pt/Ta2O5/SiO2 based reflector stack. In Proceedings of the 2007 IEEE/MTT-S International Microwave Symposium, 3-8 June 2007, Honolulu, Hawai (pp. 2047-2050). Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/MWSYM.2007.380253

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title = "High-Q BAW resonator on Pt/Ta2O5/SiO2 based reflector stack",

abstract = "This paper discusses the design and optimization of high-Q Bulk-Acoustic-Wave resonators using a Pt/Ta2O5/SiO2 reflector stack. It can be shown that by properly designing the reflector stack and boundary conditions, large performance improvements can be realized. In this paper the characterization and design of the reflector stack is described and its results are presented.",

author = "J.W. Lobeek and R.C. Strijbos and A. Jansman and {Xin Li}, N. and A.B. Smolders and N.J. Pulsford",

year = "2007",

doi = "10.1109/MWSYM.2007.380253",

language = "English",

pages = "2047--2050",

booktitle = "Proceedings of the 2007 IEEE/MTT-S International Microwave Symposium, 3-8 June 2007, Honolulu, Hawai",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

note = "conference; IEEE MTT Symposium 2007, Honolulu ; Conference date: 01-01-2007",

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Lobeek, JW, Strijbos, RC, Jansman, A, Xin Li, N, Smolders, AB & Pulsford, NJ 2007, High-Q BAW resonator on Pt/Ta2O5/SiO2 based reflector stack. in Proceedings of the 2007 IEEE/MTT-S International Microwave Symposium, 3-8 June 2007, Honolulu, Hawai. Institute of Electrical and Electronics Engineers, Piscataway, pp. 2047-2050, conference; IEEE MTT Symposium 2007, Honolulu, 1/01/07. https://doi.org/10.1109/MWSYM.2007.380253

High-Q BAW resonator on Pt/Ta2O5/SiO2 based reflector stack. / Lobeek, J.W.; Strijbos, R.C.; Jansman, A. et al.
Proceedings of the 2007 IEEE/MTT-S International Microwave Symposium, 3-8 June 2007, Honolulu, Hawai. Piscataway: Institute of Electrical and Electronics Engineers, 2007. p. 2047-2050.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Strijbos, R.C.

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AU - Smolders, A.B.

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AB - This paper discusses the design and optimization of high-Q Bulk-Acoustic-Wave resonators using a Pt/Ta2O5/SiO2 reflector stack. It can be shown that by properly designing the reflector stack and boundary conditions, large performance improvements can be realized. In this paper the characterization and design of the reflector stack is described and its results are presented.

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ER -

High-Q BAW resonator on Pt/Ta2O5/SiO2 based reflector stack

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