High-Q BAW resonator on Pt/Ta2O5/SiO2 based reflector stack

J.W. Lobeek, R.C. Strijbos, A. Jansman, N. Xin Li, A.B. Smolders, N.J. Pulsford

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

18 Citations (Scopus)
1 Downloads (Pure)

Abstract

This paper discusses the design and optimization of high-Q Bulk-Acoustic-Wave resonators using a Pt/Ta2O5/SiO2 reflector stack. It can be shown that by properly designing the reflector stack and boundary conditions, large performance improvements can be realized. In this paper the characterization and design of the reflector stack is described and its results are presented.
Original languageEnglish
Title of host publicationProceedings of the 2007 IEEE/MTT-S International Microwave Symposium, 3-8 June 2007, Honolulu, Hawai
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Pages2047-2050
DOIs
Publication statusPublished - 2007
Eventconference; IEEE MTT Symposium 2007, Honolulu -
Duration: 1 Jan 2007 → …

Conference

Conferenceconference; IEEE MTT Symposium 2007, Honolulu
Period1/01/07 → …
OtherIEEE MTT Symposium 2007, Honolulu

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