High-performance integrated mid-infrared filter arrays

Kaylee D. Hakkel; D.M.J. van Elst; Maurangelo Petruzzella; Martin Ebermann; Francesco Pagliano; Anne van Klinken; Andrea Fiore

doi:10.1049/ell2.12626

High-performance integrated mid-infrared filter arrays

Kaylee D. Hakkel (Corresponding author), D.M.J. van Elst, Maurangelo Petruzzella, Martin Ebermann, Francesco Pagliano, Anne van Klinken, Andrea Fiore

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Abstract

A static filter array is developed based on Fabry–Perot cavities operating in the mid-infrared range from 2 to 4.5 µm, matching the absorption region of several gases relevant for air quality monitoring. The filters include two distributed Bragg reflectors and a high-index tuning element with varying thickness in between. The filters display high peak transmittance (>80%) and controllable peak width. The robustness, ease of fabrication and the possibility to tune the optical response to a specific application make the integrated filter arrays suitable for compact sensing systems.

Original language	English
Pages (from-to)	884-886
Number of pages	3
Journal	Electronics Letters
Volume	58
Issue number	23
Early online date	3 Oct 2022
DOIs	https://doi.org/10.1049/ell2.12626
Publication status	Published - Nov 2022

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AU - Ebermann, Martin

AU - Pagliano, Francesco

AU - van Klinken, Anne

AU - Fiore, Andrea

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High-performance integrated mid-infrared filter arrays

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