High-performance deep submicron CMOS technologies with polycrystalline-SiGe gates

Youri V. Ponomarev, Peter A. Stolk, Cora Salm, Jurriaan Schmitz, Pierre H. Woerlee

Research output: Contribution to journalArticleAcademicpeer-review

36 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science