High performance beyond-rigid-body control of next-generation Flexible Stages

T.A.E. Oomen, R.M.A. Herpen, van, O.H. Bosgra, M.M.J. Wal, van de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationProceedings of the 10th Philips Conference on Applications of Control Technology, February 3-4, 2009, Hilvarenbeek, The Netherlands
Pages135-136
Publication statusPublished - 2009

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Oomen, T. A. E., Herpen, van, R. M. A., Bosgra, O. H., & Wal, van de, M. M. J. (2009). High performance beyond-rigid-body control of next-generation Flexible Stages. In Proceedings of the 10th Philips Conference on Applications of Control Technology, February 3-4, 2009, Hilvarenbeek, The Netherlands (pp. 135-136)