| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 10th Philips Conference on Applications of Control Technology, February 3-4, 2009, Hilvarenbeek, The Netherlands |
| Pages | 135-136 |
| Publication status | Published - 2009 |
High performance beyond-rigid-body control of next-generation Flexible Stages
T.A.E. Oomen, R.M.A. Herpen, van, O.H. Bosgra, M.M.J. Wal, van de
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
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