High performance beyond-rigid-body control of next-generation Flexible Stages

T.A.E. Oomen, R.M.A. Herpen, van, O.H. Bosgra, M.M.J. Wal, van de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

1 Downloads (Pure)
Original languageEnglish
Title of host publicationProceedings of the 10th Philips Conference on Applications of Control Technology, February 3-4, 2009, Hilvarenbeek, The Netherlands
Publication statusPublished - 2009

Cite this