High growth rate deposition of a-SiNx:H films for photovoltaic applications

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Original language	English
Title of host publication	AVS, American Vacuum Society : 48th international symposium, San Francisco, October 28-November 2, 2001 : virtual proceedings
Publication status	Published - 2001

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@inproceedings{633ef7cfe2a84ee5be6b4ce2bb14309c,

title = "High growth rate deposition of a-SiNx:H films for photovoltaic applications",

author = "J. Hong and W.M.M. Kessels and {Assche, van}, F.J.H. and D.C. Schram and {Sanden, van de}, M.C.M.",

year = "2001",

language = "English",

booktitle = "AVS, American Vacuum Society : 48th international symposium, San Francisco, October 28-November 2, 2001 : virtual proceedings",

}

TY - GEN

T1 - High growth rate deposition of a-SiNx:H films for photovoltaic applications

AU - Hong, J.

AU - Kessels, W.M.M.

AU - Assche, van, F.J.H.

AU - Schram, D.C.

AU - Sanden, van de, M.C.M.

PY - 2001

Y1 - 2001

M3 - Conference contribution

BT - AVS, American Vacuum Society : 48th international symposium, San Francisco, October 28-November 2, 2001 : virtual proceedings

ER -