High energy ion scattering and recoil spectrometry in applied materials science

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Abstract

The fundamentals of high energy ion scattering and recoil spectrometry (possibly combined with channelling) are discussed in relation to the accuracies required for materials science studies and in relation to characteristics of competing surface analysis techniques. The extreme versatility of ion scattering techniques is demonstrated by a survey through many application areas in materials science ranging from plastics to oxidic insulators, semiconductors and metals.

Original languageEnglish
Pages (from-to)55-72
Number of pages18
JournalAnalytica Chimica Acta
Volume297
Issue number1-2
DOIs
Publication statusPublished - 1 Jan 1994

Keywords

  • High energy ion scattering
  • Materials science
  • Recoil spectrometry
  • Surface techniques

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