| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts) |
| Editors | W.M.M. Kessels, A. Delabie |
| Place of Publication | S.n. |
| Pages | TueA2-4- |
| Publication status | Published - 2008 |
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