High density silane plasma for amorphous silicon coating

G.J. Meeusen, R P Dahiya, M.C.M. Sanden, van de, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationPlasma 92 : 7th national symposium on science and technology of plasma of Plasma Science Society of India, Bombay, 3-7 November, 1992 : Abstracts
Pages258
Publication statusPublished - 1992

Cite this

Meeusen, G. J., Dahiya, R. P., Sanden, van de, M. C. M., & Schram, D. C. (1992). High density silane plasma for amorphous silicon coating. In Plasma 92 : 7th national symposium on science and technology of plasma of Plasma Science Society of India, Bombay, 3-7 November, 1992 : Abstracts (pp. 258)