High concentration optical doping of Al2O3 waveguide films by Er ion implantation

G.N. Hoven, van den; E. Snoeks; A. Polman; J.W.M. Uffelen, van; Y.S. Oei; M.K. Smit

High concentration optical doping of Al2O3 waveguide films by Er ion implantation

G.N. Hoven, van den
, E. Snoeks
, A. Polman
, J.W.M. Uffelen, van
, Y.S. Oei
, M.K. Smit

Photonic Integration

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

55 Downloads (Pure)

Original language	English
Title of host publication	Proceedings of the 6th European Conference on Integrated Optics and technical Exhibit : April 18-22, 1993, Neuchatel, Switzerland ; ECIO '93
Editors	P. Roth
Place of Publication	Neuchatel
Publisher	ECIO
Pages	3/36-3/37
Publication status	Published - 1993

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590209Final published version, 199 KB

Cite this

Hoven, van den, G. N., Snoeks, E., Polman, A., Uffelen, van, J. W. M., Oei, Y. S., & Smit, M. K. (1993). High concentration optical doping of Al2O3 waveguide films by Er ion implantation. In P. Roth (Ed.), Proceedings of the 6th European Conference on Integrated Optics and technical Exhibit : April 18-22, 1993, Neuchatel, Switzerland ; ECIO '93 (pp. 3/36-3/37). ECIO.

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year = "1993",

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High concentration optical doping of Al2O3 waveguide films by Er ion implantation. / Hoven, van den, G.N.; Snoeks, E.; Polman, A. et al.
Proceedings of the 6th European Conference on Integrated Optics and technical Exhibit : April 18-22, 1993, Neuchatel, Switzerland ; ECIO '93 . ed. / P. Roth. Neuchatel: ECIO, 1993. p. 3/36-3/37.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - High concentration optical doping of Al2O3 waveguide films by Er ion implantation

AU - Hoven, van den, G.N.

AU - Snoeks, E.

AU - Polman, A.

AU - Uffelen, van, J.W.M.

AU - Oei, Y.S.

AU - Smit, M.K.

PY - 1993

Y1 - 1993

M3 - Conference contribution

SP - 3/36-3/37

BT - Proceedings of the 6th European Conference on Integrated Optics and technical Exhibit : April 18-22, 1993, Neuchatel, Switzerland ; ECIO '93

A2 - Roth, P.

PB - ECIO

CY - Neuchatel

ER -