High concentration optical doping of Al2O3 waveguide films by Er ion implantation

G.N. Hoven, van den, E. Snoeks, A. Polman, J.W.M. Uffelen, van, Y.S. Oei, M.K. Smit

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationProceedings of the 6th European Conference on Integrated Optics and technical Exhibit : April 18-22, 1993, Neuchatel, Switzerland ; ECIO '93
EditorsP. Roth
Place of PublicationNeuchatel
Publication statusPublished - 1993

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