High aspect ratio etching and application in InP-based photonic integrated circuits

F. Karouta, B. Docter, A.A.M. Kok, E.J. Geluk, J.J.G.M. Tol, van der, M.K. Smit

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Original languageEnglish
Title of host publicationproc. ECS Fall Meeting, Symposium Integrated Optoelectronics (E5)
Place of PublicationHonolulu, Hawaii
PagesMA2008-02-1/1
Publication statusPublished - 2008
Event214th Electrochemical Society Meeting (ECS 2008) -
Duration: 12 Oct 200817 Oct 2008

Conference

Conference214th Electrochemical Society Meeting (ECS 2008)
Period12/10/0817/10/08

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