High-accuracy CMM metrology for micro systems

E.J.C. Bos, F.L.M. Delbressine, H. Haitjema

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    21 Citations (Scopus)
    1 Downloads (Pure)
    Original languageEnglish
    Title of host publication8th International Symposium on measurement and quality control in production, october 12th - 15th, 2004, Erlangen, Germany
    Place of PublicationS.l.
    Number of pages8
    Publication statusPublished - 2004

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