High-accuracy CMM metrology for micro systems

E.J.C. Bos; F.L.M. Delbressine; H. Haitjema

High-accuracy CMM metrology for micro systems

E.J.C. Bos, F.L.M. Delbressine, H. Haitjema

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Original language	English
Title of host publication	8th International Symposium on measurement and quality control in production, october 12th - 15th, 2004, Erlangen, Germany
Place of Publication	S.l.
Publisher	VDI/VDE-Gesellschaft
Number of pages	8
Publication status	Published - 2004

Cite this

@inproceedings{1ecc17e2e6024dcc96efa82d6ef368bb,

title = "High-accuracy CMM metrology for micro systems",

author = "E.J.C. Bos and F.L.M. Delbressine and H. Haitjema",

year = "2004",

language = "English",

booktitle = "8th International Symposium on measurement and quality control in production, october 12th - 15th, 2004, Erlangen, Germany",

publisher = "VDI/VDE-Gesellschaft",

}

High-accuracy CMM metrology for micro systems. / Bos, E.J.C.; Delbressine, F.L.M.; Haitjema, H.

8th International Symposium on measurement and quality control in production, october 12th - 15th, 2004, Erlangen, Germany. S.l. : VDI/VDE-Gesellschaft, 2004.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review