TY - JOUR
T1 - Heterogeneous and homogeneous hydrogen kinetics in plasma chemistry
AU - Otorbaev, D.K.
AU - Sanden, van de, M.C.M.
AU - Schram, D.C.
PY - 1995
Y1 - 1995
N2 - A review of gas phase and surface kinetics of hydrogen radicals in plasma chemistry is presented. It is shown that the presence of rovibrationally excited hydrogen molecules strongly influences the mechanisms of the chemical reactions. Both homo- and heterogeneous collisional processes are analysed in that respect. As will be shown, ionizing plasmas are dominated by gas phase rovibrational excitation phenomena. By contrast the kinetics of recombining plasmas are strongly influenced by heterogeneous elementary processes, where they can be distinguished in a natural way. Examples of heterogeneous catalysis in plasmas, i.e. particle excitation phenomena at surfaces, are discussed.
AB - A review of gas phase and surface kinetics of hydrogen radicals in plasma chemistry is presented. It is shown that the presence of rovibrationally excited hydrogen molecules strongly influences the mechanisms of the chemical reactions. Both homo- and heterogeneous collisional processes are analysed in that respect. As will be shown, ionizing plasmas are dominated by gas phase rovibrational excitation phenomena. By contrast the kinetics of recombining plasmas are strongly influenced by heterogeneous elementary processes, where they can be distinguished in a natural way. Examples of heterogeneous catalysis in plasmas, i.e. particle excitation phenomena at surfaces, are discussed.
U2 - 10.1088/0963-0252/4/2/013
DO - 10.1088/0963-0252/4/2/013
M3 - Article
SN - 0963-0252
VL - 4
SP - 293
EP - 301
JO - Plasma Sources Science and Technology
JF - Plasma Sources Science and Technology
IS - 2
ER -