Hetero- and homogeneous three-dimensional hierarchical tungsten oxide nanostructures by hot-wire chemical vapor deposition

  • Z.S. Houweling
  • , P.-P.R.M.L. Harks
  • , Y. Kuang
  • , C.H.M. van der Werf
  • , J.W. Geus
  • , R.E.I. Schropp

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)
1 Downloads (Pure)

Abstract

We present the synthesis of three-dimensional tungsten oxide (WO3 − x) nanostructures, called nanocacti, using hot-wire chemical vapor deposition. The growth of the nanocacti is controlled through a succession of oxidation, reduction and re-oxidation processes. By using only a resistively heated W filament, a flow of ambient air and hydrogen at subatmospheric pressure, and a substrate heated to about 700 °C, branched nanostructures are deposited. We report three varieties of simple synthesis approaches to obtain hierarchical homo- and heterogeneous nanocacti. Furthermore, by using catalyst nanoparticles site-selection for the growth is demonstrated. The atomic, morphological and crystallographic compositions of the nanocacti are determined using a combination of electron microscopy techniques, energy-dispersive X-ray spectroscopy and electron diffraction.
Original languageEnglish
Pages (from-to)76-83
JournalThin Solid Films
Volume575
DOIs
Publication statusPublished - 30 Jan 2015
Event7th International Conference on Hot-Wire Chemical Vapor Deposition (HWCVD 2012) - Osaka, Japan
Duration: 8 Oct 201212 Oct 2012
Conference number: 7

Keywords

  • Tungsten oxide
  • Nanostructures
  • Three-dimensional
  • Hot-wire CVD
  • Nanosphere lithography

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