Hard amorphous hydrogenated carbon films deposited from an expanding thermal plasma

J.W.A.M. Gielen, M.C.M. Sanden, van de, P.R.M. Kleuskens, M.J. Zande, van der, A.G.M. Kiers, D.C. Schram

Research output: Contribution to conferenceAbstractAcademic

Original languageEnglish
Pages456-457
Publication statusPublished - 1996
EventThin Films: Stresses and Mechanical Properties VI, April 8-12, 1996, San Francisco, CA, USA - San Francisco, CA, United States
Duration: 8 Apr 199612 Apr 1996

Conference

ConferenceThin Films: Stresses and Mechanical Properties VI, April 8-12, 1996, San Francisco, CA, USA
CountryUnited States
CitySan Francisco, CA
Period8/04/9612/04/96
OtherSymposium held at the 1996 MRS Spring Meeting

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