Hard amorphous hydrogenated carbon film deposited from an expanding thermal plasma

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Original language	English
Title of host publication	Plasmatechnologie: 7. Bundesdeutsche Fachtagung, 13.-14. Maerz 1996, Rub-Bochum
Pages	17
Publication status	Published - 1996

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@inproceedings{69853bbe7b944b029b50d2cde7f6cc3d,

title = "Hard amorphous hydrogenated carbon film deposited from an expanding thermal plasma",

author = "J.W.A.M. Gielen and \{Sanden, van de\}, M.C.M. and P.R.M. Kleuskens and \{Zande, van der\}, M.J. and A.G.M. Kiers and D.C. Schram",

year = "1996",

language = "English",

pages = "17",

booktitle = "Plasmatechnologie: 7. Bundesdeutsche Fachtagung, 13.-14. Maerz 1996, Rub-Bochum",

}

TY - GEN

T1 - Hard amorphous hydrogenated carbon film deposited from an expanding thermal plasma

AU - Gielen, J.W.A.M.

AU - Sanden, van de, M.C.M.

AU - Kleuskens, P.R.M.

AU - Zande, van der, M.J.

AU - Kiers, A.G.M.

AU - Schram, D.C.

PY - 1996

Y1 - 1996

M3 - Conference contribution

SP - 17

BT - Plasmatechnologie: 7. Bundesdeutsche Fachtagung, 13.-14. Maerz 1996, Rub-Bochum

ER -